Atomic layer deposition and characterization of hafnium oxide grown on silicon from tetrakis(diethylamino)hafnium and water vapor

2004 ◽  
Vol 22 (5) ◽  
pp. 2035-2040 ◽  
Author(s):  
Anand Deshpande ◽  
Ronald Inman ◽  
Gregory Jursich ◽  
Christos Takoudis
Keyword(s):  
Water Vapor ◽  
Atomic Layer Deposition ◽  
Hafnium Oxide ◽  
Atomic Layer ◽  
Layer Deposition

Optical and electrical characterization of hafnium oxide deposited by liquid injection atomic layer deposition

2007 ◽  
Vol 47 (4-5) ◽  
pp. 825-829 ◽  
Author(s):  
P. Taechakumput ◽  
S. Taylor ◽  
O. Buiu ◽  
R.J. Potter ◽  
P.R. Chalker ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Hafnium Oxide ◽  
Electrical Characterization ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Liquid Injection

Infrared characterization of hafnium oxide grown by atomic layer deposition using ozone as the oxygen precursor

2007 ◽  
Vol 90 (2) ◽  
pp. 022906 ◽  
Author(s):  
Y. Wang ◽  
M. Dai ◽  
M.-T. Ho ◽  
L. S. Wielunski ◽  
Y. J. Chabal
Keyword(s):  
Atomic Layer Deposition ◽  
Hafnium Oxide ◽  
Atomic Layer ◽  
Layer Deposition

Electrical characterization of hafnium oxide and hafnium-rich silicate films grown by atomic layer deposition

2005 ◽  
Vol 45 (5-6) ◽  
pp. 949-952 ◽  
Author(s):  
S. Dueñas ◽  
H. Castán ◽  
H. García ◽  
J. Barbolla ◽  
K. Kukli ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Hafnium Oxide ◽  
Electrical Characterization ◽  
Atomic Layer ◽  
Layer Deposition

Characterization of Ultra-Thin Hafnium Oxide Films Grown on Silicon by Atomic Layer Deposition Using Tetrakis(ethylmethyl-amino) Hafnium and Water Precursors

2007 ◽  
Vol 19 (13) ◽  
pp. 3127-3138 ◽  
Author(s):  
Y. Wang ◽  
M.-T. Ho ◽  
L. V. Goncharova ◽  
L. S. Wielunski ◽  
S. Rivillon-Amy ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Hafnium Oxide ◽  
Oxide Films ◽  
Atomic Layer ◽  
Layer Deposition

Characterization of hafnium oxide grown on silicon by atomic layer deposition: Interface structure

2006 ◽  
Vol 83 (3) ◽  
pp. 547-552 ◽  
Author(s):  
Anand Deshpande ◽  
Ronald Inman ◽  
Gregory Jursich ◽  
Christos Takoudis
Keyword(s):  
Atomic Layer Deposition ◽  
Hafnium Oxide ◽  
Atomic Layer ◽  
Interface Structure ◽  
Layer Deposition

In Situ Characterization of Gas-Phase Species Present During Hafnium Oxide Atomic Layer Deposition

2019 ◽  
Vol 2 (7) ◽  
pp. 133-143 ◽  
Author(s):  
James E. Maslar ◽  
Wilbur Hurst ◽  
Donald Burgess ◽  
William Kimes ◽  
Nhan Nguyen
Keyword(s):  
Atomic Layer Deposition ◽  
Gas Phase ◽  
Hafnium Oxide ◽  
Atomic Layer ◽  
In Situ Characterization ◽  
Layer Deposition

scholarly journals Magneto-optical characterization of ZnO / Ni nano-laminate obtained via Atomic Layer Deposition

2021 ◽  
Vol 1762 (1) ◽  
pp. 012041
Author(s):  
K Buchkov ◽  
A Galluzzi ◽  
B Blagoev ◽  
A Paskaleva ◽  
P Terziyska ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Optical Characterization ◽  
Layer Deposition

Optical characterization of type-II ZnO/ZnS multiple quantum wells grown by atomic layer deposition

2020 ◽  
Vol 694 ◽  
pp. 137740 ◽  
Author(s):  
Mostafa Afifi Hassan ◽  
Aadil Waseem ◽  
Muhammad Ali Johar ◽  
Sou Young Yu ◽  
June Key Lee ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Quantum Wells ◽  
Atomic Layer ◽  
Optical Characterization ◽  
Multiple Quantum Wells ◽  
Multiple Quantum ◽  
Type Ii ◽  
Layer Deposition
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