Chemical, optical, and electrical characterization of Ga2O3 thin films grown by plasma-enhanced atomic layer deposition

2019 ◽  
Vol 19 (2) ◽  
pp. 72-81 ◽  
Author(s):  
Xing Li ◽  
Hong-Liang Lu ◽  
Hong-Ping Ma ◽  
Jian-Guo Yang ◽  
Jin-Xin Chen ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Electrical Characterization ◽  
Atomic Layer ◽  
Layer Deposition

Physical and electrical characterization of yttrium-stabilized zirconia (YSZ) thin films deposited by sputtering and atomic-layer deposition

2018 ◽  
Vol 29 (18) ◽  
pp. 15349-15357 ◽  
Author(s):  
Joel Molina-Reyes ◽  
Hugo Tiznado ◽  
Gerardo Soto ◽  
Monica Vargas-Bautista ◽  
David Dominguez ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Electrical Characterization ◽  
Atomic Layer ◽  
Stabilized Zirconia ◽  
Layer Deposition

scholarly journals Electrical characterization of amorphous LiAlO2 thin films deposited by atomic layer deposition

RSC Advances ◽  
2016 ◽  
Vol 6 (65) ◽  
pp. 60479-60486 ◽  
Author(s):  
Yang Hu ◽  
Amund Ruud ◽  
Ville Miikkulainen ◽  
Truls Norby ◽  
Ola Nilsen ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Electrical Characterization ◽  
Atomic Layer ◽  
Layer Deposition

Comparison of in-plane and cross-plane conductivity on ALD-deposited LiAlO2 thin films.

Atomic Layer Deposition and Characterization of Erbium Oxide-Doped Zirconium Oxide Thin Films

2010 ◽  
Vol 157 (10) ◽  
pp. G193 ◽  
Author(s):  
Aile Tamm ◽  
Marianna Kemell ◽  
Jekaterina Kozlova ◽  
Timo Sajavaara ◽  
Massimo Tallarida ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Zirconium Oxide ◽  
Atomic Layer ◽  
Erbium Oxide ◽  
Oxide Thin Films ◽  
Layer Deposition
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