Development of perfect silicon corrugated diaphragm using anisotropic etching

2006 ◽  
Vol 83 (4-9) ◽  
pp. 1438-1441 ◽  
Author(s):  
Norhayati Soin ◽  
B.Y. Majlis
Keyword(s):  
Anisotropic Etching ◽  
Corrugated Diaphragm

Pembentukan Diafragma Beralun Silikon Dengan Menggunakan Teknik Punaran Anisotropik

2012 ◽  
Author(s):  
Norhayati Soin ◽  
Burhanuddin Yeop Majlis
Keyword(s):  
Key Words ◽  
Experimental Studies ◽  
Anisotropic Etching ◽  
Etching Technique ◽  
Convex Corner ◽  
Mask Design ◽  
Etching Mask ◽  
Corrugated Diaphragm

Kertas ini memaparkan kajian mengenai pembentukan diafragma beralun silikon dengan menggunakan teknik punaran anisotropik di mana larutan kalium hidroksida digunakan sebagai larutan pemunar. Kajian ini meliputi pengoptimuman topeng punaran bagi mengatasi masalah keadaan potong bawah penjuru yang berlaku pada struktur berpenjuru cembung diafragma beralun yang terpunar. Hasil yang diperolehi daripada kajian simulasi dan eksperimen membuktikan bahawa pengoptimuman topeng punaran yang telah dilakukan berkemampuan mengatasi masalah potong bawah penjuru diafragma beralun silikon. Kata kunci: diafragma beralun, punaran anisotropik, pengoptimuman topeng This paper presents the study of the formation of a perfect silicon corrugated diaphragm using anisotropic etching technique. Potassim hydroxide (KOH) solution is used as the etching solvent in this study. This study includes optimization of the etching mask, in order to avoid the problem of corner undercutting which exists on all convex corner structures on the etched corrugated diaphragm. Results from the simulation and experimental studies have proved that the optimized etching mask design was able to overcome the problem of convex corner undercutting. Key words: corrugated diaphragm, anisotropic etching, mask optimization

A study of two-step silicon anisotropic etching for a polygon-shaped microstructure using KOH solution

1997 ◽  
Vol 62 (1-3) ◽  
pp. 646-651 ◽  
Author(s):  
In-Byeong Kang ◽  
Malcolm R. Haskard ◽  
Noel D. Samaan
Keyword(s):  
Anisotropic Etching

From atomic parameters to anisotropic etching diagrams

1996 ◽  
Vol 37 (1-3) ◽  
pp. 146-149 ◽  
Author(s):  
N. Moldovan ◽  
Mihaela Ilie
Keyword(s):  
Anisotropic Etching ◽  
Atomic Parameters

Atomically flat diamond (100) surface formation by anisotropic etching of solid-solution reaction of carbon into nickel

2016 ◽  
Vol 68 ◽  
pp. 127-130 ◽  
Author(s):  
Kazuhiro Nakanishi ◽  
Hiroki Kuroshima ◽  
Tsubasa Matsumoto ◽  
Takao Inokuma ◽  
Norio Tokuda
Keyword(s):  
Solid Solution ◽  
Anisotropic Etching ◽  
Surface Formation ◽  
Solution Reaction ◽  
Atomically Flat

Anisotropic etching in low-concentration KOH: effects of surfactant concentration

2015 ◽  
Vol 10 (4) ◽  
pp. 224-228 ◽  
Author(s):  
Prem Pal ◽  
Yan Xing ◽  
Subhomoy Haldar ◽  
Kazuo Sato ◽  
Akarapu Ashok
Keyword(s):  
Surfactant Concentration ◽  
Anisotropic Etching ◽  
Low Concentration
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