Proceedings IEEE Micro Electro Mechanical Systems. 1995
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Optical tactile sensor using surface-emitting laser

Proceedings IEEE Micro Electro Mechanical Systems. 1995 ◽

10.1109/memsys.1995.472575 ◽

2005 ◽

Cited By ~ 3

Author(s):

E. Yamamoto ◽

S. Hashimoto ◽

M. Ito ◽

I. Komazaki ◽

K. Yanagisawa

Keyword(s):

Tactile Sensor ◽

Surface Emitting Laser

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Groove depth uniformization in [110] Si anisotropic etching by ultrasonic wave and application to accelerometer fabrication

Proceedings IEEE Micro Electro Mechanical Systems. 1995 ◽

10.1109/memsys.1995.472546 ◽

2005 ◽

Cited By ~ 9

Author(s):

K. Ohwada ◽

Y. Negoro ◽

Y. Konaka ◽

T. Oguchi

Keyword(s):

Ultrasonic Wave ◽

Groove Depth ◽

Anisotropic Etching

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System design for cooperative control of arrayed microactuators

Proceedings IEEE Micro Electro Mechanical Systems. 1995 ◽

10.1109/memsys.1995.472601 ◽

2005 ◽

Cited By ~ 6

Author(s):

S. Konishi ◽

H. Fujita

Keyword(s):

System Design ◽

Cooperative Control

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Nonlinearity and hysteresis of resonant strain gauges

Proceedings IEEE Micro Electro Mechanical Systems. 1995 ◽

10.1109/memsys.1995.472588 ◽

2005 ◽

Author(s):

Chengqun Gui ◽

R. Legtenberg ◽

H.A.C. Tilmans ◽

J.H.J. Fluitman ◽

M. Elwenspoek

Keyword(s):

Strain Gauges

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Piezoelectric composites for micro-ultrasonic transducers realized with deep-etch X-ray lithography

Proceedings IEEE Micro Electro Mechanical Systems. 1995 ◽

10.1109/memsys.1995.472581 ◽

2005 ◽

Cited By ~ 9

Author(s):

Y. Hirata ◽

H. Okuyama ◽

S. Ogino ◽

T. Numazawa ◽

H. Takada

Keyword(s):

Ultrasonic Transducers ◽

Piezoelectric Composites ◽

X Ray

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Ultrasound barrier based on packaged micromachined membrane resonators

Proceedings IEEE Micro Electro Mechanical Systems. 1995 ◽

10.1109/memsys.1995.472599 ◽

2005 ◽

Cited By ~ 6

Author(s):

M. Hornung ◽

R. Frey ◽

O. Brand ◽

H. Baltes ◽

C. Hafner

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Novel functionality using micro-gaseous devices

Proceedings IEEE Micro Electro Mechanical Systems. 1995 ◽

10.1109/memsys.1995.472551 ◽

2005 ◽

Cited By ~ 3

Author(s):

H.C. Nathanson ◽

I. Liberman ◽

C. Freidhoff

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Dome-shaped diaphragm microtransducers

Proceedings IEEE Micro Electro Mechanical Systems. 1995 ◽

10.1109/memsys.1995.472570 ◽

2005 ◽

Cited By ~ 2

Author(s):

Hong Zhang ◽

Fun Sok Kim

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Electrostatic curved electrode actuators

Proceedings IEEE Micro Electro Mechanical Systems. 1995 ◽

10.1109/memsys.1995.472557 ◽

2005 ◽

Cited By ~ 21

Author(s):

R. Legtenberg ◽

E. Berenschot ◽

M. Elwenspoek ◽

J. Fluitman

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Development of a microphotocantilever for near-field scanning optical microscopy

Proceedings IEEE Micro Electro Mechanical Systems. 1995 ◽

10.1109/memsys.1995.472538 ◽

2005 ◽

Cited By ~ 4

Author(s):

S. Akamine ◽

H. Kuwano ◽

K. Fukuzawa ◽

H. Yamada

Keyword(s):

Optical Microscopy ◽

Near Field ◽

Scanning Optical Microscopy ◽

Near Field Scanning

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Proceedings IEEE Micro Electro Mechanical Systems. 1995Latest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

Optical tactile sensor using surface-emitting laser

Groove depth uniformization in [110] Si anisotropic etching by ultrasonic wave and application to accelerometer fabrication

System design for cooperative control of arrayed microactuators

Nonlinearity and hysteresis of resonant strain gauges

Piezoelectric composites for micro-ultrasonic transducers realized with deep-etch X-ray lithography

Ultrasound barrier based on packaged micromachined membrane resonators

Novel functionality using micro-gaseous devices

Dome-shaped diaphragm microtransducers

Electrostatic curved electrode actuators

Development of a microphotocantilever for near-field scanning optical microscopy

Proceedings IEEE Micro Electro Mechanical Systems. 1995
Latest Publications