Characterization of Anisotropic Etching Effects of KOH Concentration and Temperature on Etching Profiles Properties of Silicon Corrugated Diaphragm

2011 ◽  
Author(s):  
Norhayati Soin ◽  
Y. Majlis ◽  
H. B. Senin ◽  
N. H. Idris
Keyword(s):  
Anisotropic Etching ◽  
Corrugated Diaphragm

Pembentukan Diafragma Beralun Silikon Dengan Menggunakan Teknik Punaran Anisotropik

2012 ◽  
Author(s):  
Norhayati Soin ◽  
Burhanuddin Yeop Majlis
Keyword(s):  
Key Words ◽  
Experimental Studies ◽  
Anisotropic Etching ◽  
Etching Technique ◽  
Convex Corner ◽  
Mask Design ◽  
Etching Mask ◽  
Corrugated Diaphragm

Kertas ini memaparkan kajian mengenai pembentukan diafragma beralun silikon dengan menggunakan teknik punaran anisotropik di mana larutan kalium hidroksida digunakan sebagai larutan pemunar. Kajian ini meliputi pengoptimuman topeng punaran bagi mengatasi masalah keadaan potong bawah penjuru yang berlaku pada struktur berpenjuru cembung diafragma beralun yang terpunar. Hasil yang diperolehi daripada kajian simulasi dan eksperimen membuktikan bahawa pengoptimuman topeng punaran yang telah dilakukan berkemampuan mengatasi masalah potong bawah penjuru diafragma beralun silikon. Kata kunci: diafragma beralun, punaran anisotropik, pengoptimuman topeng This paper presents the study of the formation of a perfect silicon corrugated diaphragm using anisotropic etching technique. Potassim hydroxide (KOH) solution is used as the etching solvent in this study. This study includes optimization of the etching mask, in order to avoid the problem of corner undercutting which exists on all convex corner structures on the etched corrugated diaphragm. Results from the simulation and experimental studies have proved that the optimized etching mask design was able to overcome the problem of convex corner undercutting. Key words: corrugated diaphragm, anisotropic etching, mask optimization

scholarly journals Characterization of 45° Micromirrors Fabricated by Silicon Anisotropic Etching in Solutions Containing Different Organic Additives

2012 ◽  
Vol 47 ◽  
pp. 510-513 ◽  
Author(s):  
Krzysztof Rola ◽  
Konrad Ptasiński ◽  
Adrian Zakrzewski ◽  
Irena Zubel
Keyword(s):  
Anisotropic Etching ◽  
Organic Additives

Morphological Characterization of Mycobacteriophage R1

1974 ◽  
Vol 32 ◽  
pp. 254-255
Author(s):  
B. L. Soloff ◽  
T. A. Rado
Keyword(s):  
Carbon Source ◽  
Stationary Phase ◽  
Growth Phase ◽  
Minimal Medium ◽  
Morphological Characterization ◽  
Logarithmic Growth Phase ◽  
Complete Lysis ◽  
Lysogenic Culture ◽  
Logarithmic Growth

Mycobacteriophage R1 was originally isolated from a lysogenic culture of M. butyricum. The virus was propagated on a leucine-requiring derivative of M. smegmatis, 607 leu−, isolated by nitrosoguanidine mutagenesis of typestrain ATCC 607. Growth was accomplished in a minimal medium containing glycerol and glucose as carbon source and enriched by the addition of 80 μg/ ml L-leucine. Bacteria in early logarithmic growth phase were infected with virus at a multiplicity of 5, and incubated with aeration for 8 hours. The partially lysed suspension was diluted 1:10 in growth medium and incubated for a further 8 hours. This permitted stationary phase cells to re-enter logarithmic growth and resulted in complete lysis of the culture.

AEM analysis of crystallization in Ti-based amorphous alloys

1983 ◽  
Vol 41 ◽  
pp. 270-271
Author(s):  
A.R. Pelton ◽  
A.F. Marshall ◽  
Y.S. Lee
Keyword(s):  
Magnetic Properties ◽  
Amorphous Alloys ◽  
Amorphous Materials ◽  
Isothermal Annealing ◽  
Amorphous Matrix ◽  
Nucleation And Growth ◽  
Current Interest ◽  
Amorphous Films ◽  
Electrical And Magnetic Properties

Amorphous materials are of current interest due to their desirable mechanical, electrical and magnetic properties. Furthermore, crystallizing amorphous alloys provides an avenue for discerning sequential and competitive phases thus allowing access to otherwise inaccessible crystalline structures. Previous studies have shown the benefits of using AEM to determine crystal structures and compositions of partially crystallized alloys. The present paper will discuss the AEM characterization of crystallized Cu-Ti and Ni-Ti amorphous films.Cu60Ti40: The amorphous alloy Cu60Ti40, when continuously heated, forms a simple intermediate, macrocrystalline phase which then transforms to the ordered, equilibrium Cu3Ti2 phase. However, contrary to what one would expect from kinetic considerations, isothermal annealing below the isochronal crystallization temperature results in direct nucleation and growth of Cu3Ti2 from the amorphous matrix.

Characterization of Coherent, Ordered Precipitates in Nickel-Base Alloys

1973 ◽  
Vol 31 ◽  
pp. 144-145
Author(s):  
B. H. Kear ◽  
J. M. Oblak
Keyword(s):  
Stable Phase ◽  
Nickel Base Superalloy ◽  
Alloy 718 ◽  
Commercial Alloy ◽  
Precipitate Morphology ◽  
Continuous Precipitation ◽  
Nickel Base ◽  
Base Superalloy ◽  
Strengthening Precipitate

A nickel-base superalloy is essentially a Ni/Cr solid solution hardened by additions of Al (Ti, Nb, etc.) to precipitate a coherent, ordered phase. In most commercial alloy systems, e.g. B-1900, IN-100 and Mar-M200, the stable precipitate is Ni3 (Al,Ti) γ′, with an LI2structure. In A lloy 901 the normal precipitate is metastable Nis Ti3 γ′ ; the stable phase is a hexagonal Do2 4 structure. In Alloy 718 the strengthening precipitate is metastable γ″, which has a body-centered tetragonal D022 structure.Precipitate MorphologyIn most systems the ordered γ′ phase forms by a continuous precipitation re-action, which gives rise to a uniform intragranular dispersion of precipitate particles. For zero γ/γ′ misfit, the γ′ precipitates assume a spheroidal.

The Use of Advanced Analytical Techniques for Characterization of the Chemical, Physical, and Crystallographic Nature of a Surface

1973 ◽  
Vol 31 ◽  
pp. 132-133 ◽  
Author(s):  
R. E. Herfert
Keyword(s):  
Surface Characterization ◽  
Analytical Techniques ◽  
X Ray Diffraction ◽  
Depth Of Penetration ◽  
X Ray ◽  
The Past ◽  
Transmission Electron ◽  
Scanning Electron

Studies of the nature of a surface, either metallic or nonmetallic, in the past, have been limited to the instrumentation available for these measurements. In the past, optical microscopy, replica transmission electron microscopy, electron or X-ray diffraction and optical or X-ray spectroscopy have provided the means of surface characterization. Actually, some of these techniques are not purely surface; the depth of penetration may be a few thousands of an inch. Within the last five years, instrumentation has been made available which now makes it practical for use to study the outer few 100A of layers and characterize it completely from a chemical, physical, and crystallographic standpoint. The scanning electron microscope (SEM) provides a means of viewing the surface of a material in situ to magnifications as high as 250,000X.

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