Measurements of the spatially resolved electron temperature and plasma potential in ferrite-core side type Ar/He inductively-coupled plasmas

2015 ◽  
Vol 15 (9) ◽  
pp. 1036-1041 ◽  
Author(s):  
Duksun Han ◽  
Hyo-Chang Lee ◽  
Jin-Young Bang ◽  
Chin-Wook Chung ◽  
Se Youn Moon
Keyword(s):  
Electron Temperature ◽  
Plasma Potential ◽  
Inductively Coupled Plasmas ◽  
Ferrite Core ◽  
Inductively Coupled ◽  
Spatially Resolved ◽  
Coupled Plasmas

Excitation Temperatures and Electron Number Densities Experienced by Analyte Species in Inductively Coupled Plasmas with and without the Presence of an Easily Ionized Element

1977 ◽  
Vol 31 (2) ◽  
pp. 137-150 ◽  
Author(s):  
D. J. Kalnicky ◽  
V. A. Fassel ◽  
R. N. Kniseley
Keyword(s):  
Electron Density ◽  
Argon Plasma ◽  
Radial Excitation ◽  
Stark Broadening ◽  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Density Distributions ◽  
Spatially Resolved ◽  
Density Values ◽  
Coupled Plasmas

Spatially resolved radial excitation temperatures and radial electron density distributions experienced by analyte species in the observation zone of 15 to 25 mm above the load coil of a toroidally shaped, inductively coupled argon plasma are presented and related to the analytical performance of these plasmas. A comparison of radial temperatures measured with support gas (Ar I) lines and with a typical analyte thermometric species (Pe I) at 15 mm above the load coil is given. Radial (Fe I) excitation temperatures obtained at three observation heights are compared for aerosol carrier flows of 1.0 and 1.3 liters/min. The addition of a large amount of an easily ionized element (6900 µg of Na per ml) did not significantly change Fe I excitation temperature distributions at the respective aerosol carrier flows and observation heights. A comparison of radial electron density distributions measured with Saha-Eggert ionization and with Stark broadening methods is given for an observation height of 15 mm above the load coil. The differences between electron density values obtained by these methods is discussed. The effect of addition of 6900 µg of Na per ml on Saha-Eggert electron density distributions at three observation heights is also discussed.

Study of ashing for low-k dielectrics using the N2/O2 ferrite-core inductively coupled plasmas

2006 ◽  
Vol 506-507 ◽  
pp. 222-224 ◽  
Author(s):  
Hyoun Woo Kim ◽  
Ju Hyun Myung ◽  
Nam Ho Kim ◽  
Han Sup Lee ◽  
Se-Geun Park ◽  
...  
Keyword(s):  
Inductively Coupled Plasmas ◽  
Ferrite Core ◽  
Inductively Coupled ◽  
Coupled Plasmas ◽  
Low K

Etching characteristics of photoresist and low-k dielectrics by Ar/O2 ferrite-core inductively coupled plasmas

2008 ◽  
Vol 85 (2) ◽  
pp. 300-303 ◽  
Author(s):  
Hyoun Woo Kim ◽  
Jong Woo Lee ◽  
Woon Suk Hwang ◽  
Beom Hoan O ◽  
Seung Gol Lee ◽  
...  
Keyword(s):  
Inductively Coupled Plasmas ◽  
Ferrite Core ◽  
Inductively Coupled ◽  
Coupled Plasmas ◽  
Low K

Photoresist ashing in nitrogen gas using ferrite core inductively coupled plasmas

Vacuum ◽  
2005 ◽  
Vol 80 (1-3) ◽  
pp. 193-197 ◽  
Author(s):  
Hyoun Woo Kim ◽  
Ju Hyun Myung ◽  
Nam Ho Kim ◽  
Chin Wook Chung ◽  
Wan Jae Park ◽  
...  
Keyword(s):  
Inductively Coupled Plasmas ◽  
Ferrite Core ◽  
Nitrogen Gas ◽  
Inductively Coupled ◽  
Coupled Plasmas
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