scholarly journals Radio-frequency plasma potential variations originating from capacitive coupling from the coil antenna in inductively coupled plasmas

1999 ◽  
Vol 85 (7) ◽  
pp. 3428-3434 ◽  
Author(s):  
M. Watanabe ◽  
D. M. Shaw ◽  
G. J. Collins ◽  
H. Sugai
Keyword(s):  
Radio Frequency ◽  
Plasma Potential ◽  
Capacitive Coupling ◽  
Radio Frequency Plasma ◽  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Frequency Plasma ◽  
Coupled Plasmas ◽  
Coil Antenna

Synthesis of carbon nanosheets by inductively coupled radio-frequency plasma enhanced chemical vapor deposition

Carbon ◽  
2004 ◽  
Vol 42 (14) ◽  
pp. 2867-2872 ◽  
Author(s):  
Jianjun Wang ◽  
Mingyao Zhu ◽  
Ron A. Outlaw ◽  
Xin Zhao ◽  
Dennis M. Manos ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Radio Frequency ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Radio Frequency Plasma ◽  
Carbon Nanosheets ◽  
Inductively Coupled ◽  
Frequency Plasma

Electronic dynamic behavior in inductively coupled plasmas with radio-frequency bias

2014 ◽  
Vol 23 (11) ◽  
pp. 115202 ◽  
Author(s):  
Fei Gao ◽  
Yu-Ru Zhang ◽  
Shu-Xia Zhao ◽  
Xue-Chun Li ◽  
You-Nian Wang
Keyword(s):  
Radio Frequency ◽  
Dynamic Behavior ◽  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Coupled Plasmas
Sign in / Sign up

Export Citation Format

Share Document