Spatially resolved mass spectrometric sampling of inductively coupled plasmas using a movable sampling orifice

2003 ◽  
Vol 21 (6) ◽  
pp. 1971-1977 ◽  
Author(s):  
Xi Li ◽  
Gottlieb S. Oehrlein ◽  
Marc Schaepkens ◽  
Robert E. Ellefson ◽  
Louis C. Frees
Keyword(s):  
Mass Spectrometric ◽  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Sampling Orifice ◽  
Spatially Resolved ◽  
Coupled Plasmas

Excitation Temperatures and Electron Number Densities Experienced by Analyte Species in Inductively Coupled Plasmas with and without the Presence of an Easily Ionized Element

1977 ◽  
Vol 31 (2) ◽  
pp. 137-150 ◽  
Author(s):  
D. J. Kalnicky ◽  
V. A. Fassel ◽  
R. N. Kniseley
Keyword(s):  
Electron Density ◽  
Argon Plasma ◽  
Radial Excitation ◽  
Stark Broadening ◽  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Density Distributions ◽  
Spatially Resolved ◽  
Density Values ◽  
Coupled Plasmas

Spatially resolved radial excitation temperatures and radial electron density distributions experienced by analyte species in the observation zone of 15 to 25 mm above the load coil of a toroidally shaped, inductively coupled argon plasma are presented and related to the analytical performance of these plasmas. A comparison of radial temperatures measured with support gas (Ar I) lines and with a typical analyte thermometric species (Pe I) at 15 mm above the load coil is given. Radial (Fe I) excitation temperatures obtained at three observation heights are compared for aerosol carrier flows of 1.0 and 1.3 liters/min. The addition of a large amount of an easily ionized element (6900 µg of Na per ml) did not significantly change Fe I excitation temperature distributions at the respective aerosol carrier flows and observation heights. A comparison of radial electron density distributions measured with Saha-Eggert ionization and with Stark broadening methods is given for an observation height of 15 mm above the load coil. The differences between electron density values obtained by these methods is discussed. The effect of addition of 6900 µg of Na per ml on Saha-Eggert electron density distributions at three observation heights is also discussed.

scholarly journals Erratum: Power Matching to Pulsed Inductively Coupled Plasmas [J. Appl. Phys. 127, 133302 (2020)]

2020 ◽  
Vol 128 (8) ◽  
pp. 089901
Author(s):  
Chenhui Qu ◽  
Steven J. Lanham ◽  
Steven C. Shannon ◽  
Sang Ki Nam ◽  
Mark J. Kushner
Keyword(s):  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Power Matching ◽  
Coupled Plasmas

Etching characteristics of ZnO thin films in chlorine-containing inductively coupled plasmas

2006 ◽  
Vol 83 (2) ◽  
pp. 328-335 ◽  
Author(s):  
S.W. Na ◽  
M.H. Shin ◽  
Y.M. Chung ◽  
J.G. Han ◽  
S.H. Jeung ◽  
...  
Keyword(s):  
Thin Films ◽  
Zno Thin Films ◽  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Coupled Plasmas
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