Fabrication of metal nano dot dry etching mask using block copolymer thin film

2009 ◽  
Vol 9 (1) ◽  
pp. S82-S84 ◽  
Author(s):  
G.B. Kang ◽  
S.-I. Kim ◽  
Y.T. Kim ◽  
J.H. Park
Keyword(s):  
Thin Film ◽  
Block Copolymer ◽  
Dry Etching ◽  
Etching Mask

Electrolysis on a Chip with Tunable Thin Film Nanostructured PGM Electrocatalysts Generated from Self‐Assembled Block Copolymer Templates

Small ◽  
2021 ◽  
pp. 2100437
Author(s):  
Deepra Bhattacharya ◽  
Subarna Kole ◽  
Orhan Kizilkaya ◽  
Joseph Strzalka ◽  
Polyxeni P. Angelopoulou ◽  
...  
Keyword(s):  
Thin Film ◽  
Block Copolymer ◽  
Self Assembled

Facile synthesis of mesoporous TiO2 film templated by block copolymer for photocatalytic applications

2021 ◽  
Author(s):  
Olufemi Olatidoye ◽  
Daria Thomas ◽  
Bishnu Bastakoti
Keyword(s):  
Thin Film ◽  
Block Copolymer ◽  
Ethylene Oxide ◽  
Tio2 Thin Film ◽  
Polymeric Micelles ◽  
Polymeric Micelle ◽  
Mesoporous Tio2 ◽  
Facile Synthesis ◽  
Vinyl Pyridine ◽  
Photocatalytic Applications

A facile synthesis of a mesoporous TiO2 thin film is reported using poly(styrene-2-vinyl pyridine-ethylene oxide) polymeric micelle as a synthetic template. As the Ti precursor strongly binds with polymeric micelles...

Transfer of Pre-Assembled Block Copolymer Thin Film to Nanopattern Unconventional Substrates

2014 ◽  
Vol 6 (12) ◽  
pp. 9442-9448 ◽  
Author(s):  
Jonathan W. Choi ◽  
Myungwoong Kim ◽  
Nathaniel S. Safron ◽  
Michael S. Arnold ◽  
Padma Gopalan
Keyword(s):  
Thin Film ◽  
Block Copolymer

scholarly journals Effect of annealing and UV-radiation time over micropore architecture of self-assembled block copolymer thin film

2015 ◽  
Vol 9 (6) ◽  
pp. 525-535 ◽  
Author(s):  
G. del C. Pizarro ◽  
O. G. Marambio ◽  
M. Jeria-Orell ◽  
C. M. Gonzalez-Henriquez ◽  
M. Sarabia-Vallejos ◽  
...  
Keyword(s):  
Thin Film ◽  
Block Copolymer ◽  
Uv Radiation ◽  
Self Assembled ◽  
Radiation Time

scholarly journals Publisher’s Note: “Origin of thermally stable ferroelectricity in a porous barium titanate thin film synthesized through block copolymer templating” [APL Mater. 5, 076111 (2017)]

APL Materials ◽  
2017 ◽  
Vol 5 (9) ◽  
pp. 099901
Author(s):  
Norihiro Suzuki ◽  
Minoru Osada ◽  
Motasim Billah ◽  
Zeid Abdullah Alothman ◽  
Yoshio Bando ◽  
...  
Keyword(s):  
Thin Film ◽  
Block Copolymer ◽  
Barium Titanate ◽  
Thermally Stable ◽  
Barium Titanate Thin Film ◽  
Titanate Thin Film

Large scale alignment of a lamellar block copolymer thin film via electric fields: a time-resolved SFM study

Soft Matter ◽  
2006 ◽  
Vol 2 (12) ◽  
pp. 1089-1094 ◽  
Author(s):  
Violetta Olszowka ◽  
Markus Hund ◽  
Volker Kuntermann ◽  
Sabine Scherdel ◽  
Larisa Tsarkova ◽  
...  
Keyword(s):  
Thin Film ◽  
Block Copolymer ◽  
Electric Fields ◽  
Large Scale ◽  
Time Resolved ◽  
Large Scale Alignment

Synthesis of amphiphilic block copolymer using trimethylene carbonate bearing oligo(ethylene glycol) and investigation of thin film including cilostazol

2020 ◽  
Vol 58 (17) ◽  
pp. 2347-2354
Author(s):  
Hiroaki Nobuoka ◽  
Masakazu Nagasawa ◽  
Nalinthip Chanthaset ◽  
Hiroaki Yoshida ◽  
Yoshiaki Haramiishi ◽  
...  
Keyword(s):  
Thin Film ◽  
Block Copolymer ◽  
Ethylene Glycol ◽  
Amphiphilic Block Copolymer ◽  
Trimethylene Carbonate

scholarly journals Engineering block copolymer materials for patterning ultra-low dimensions

2020 ◽  
Vol 5 (10) ◽  
pp. 1642-1657
Author(s):  
Cian Cummins ◽  
Guillaume Pino ◽  
Daniele Mantione ◽  
Guillaume Fleury
Keyword(s):  
Thin Film ◽  
Block Copolymer ◽  
Block Copolymers ◽  
Low Dimensions ◽  
Processing Strategies ◽  
Synthetic Routes ◽  
Film Processing ◽  
Thin Film Processing

Recently engineered high χ-low N block copolymers for nanolithography are evaluated. Synthetic routes together with thin film processing strategies are highlighted that could enable the relentless scaling for logic technologies at sub-10 nanometres.

scholarly journals A Study of the Dry Etching Properties of TiN Thin Film in He/BCl3/Cl2Inductively Coupled Plasma

2011 ◽  
Vol 24 (9) ◽  
pp. 718-722
Author(s):  
Jong-Chang Woo ◽  
Young-Hee Joo ◽  
Jung-Soo Park ◽  
Chang-Il Kim
Keyword(s):  
Thin Film ◽  
Dry Etching
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