Preparation and tribological characterization of amorphous carbon nitride coatings in a RF PECVD–DC PVD hybrid coating process

2012 ◽  
Vol 258 (17) ◽  
pp. 6576-6582 ◽  
Author(s):  
Pengfei Wang ◽  
Takanori Takeno ◽  
Koshi Adachi ◽  
Hiroyuki Miki ◽  
Toshiyuki Takagi
Keyword(s):  
Amorphous Carbon ◽  
Carbon Nitride ◽  
Hybrid Coating ◽  
Coating Process ◽  
Nitride Coatings ◽  
Amorphous Carbon Nitride ◽  
Tribological Characterization

Characterization of hydrogenated amorphous carbon nitride particles and coatings obtained in a CH4/N2 radiofrequency discharge

2005 ◽  
Vol 482 (1-2) ◽  
pp. 226-231 ◽  
Author(s):  
Jérémy Pereira ◽  
Isabelle Géraud-Grenier ◽  
Véronique Massereau-Guilbaud ◽  
André Plain
Keyword(s):  
Amorphous Carbon ◽  
Carbon Nitride ◽  
Hydrogenated Amorphous Carbon ◽  
Radiofrequency Discharge ◽  
Amorphous Carbon Nitride ◽  
Hydrogenated Amorphous

Structural, mechanical and tribological behavior of fullerene-like and amorphous carbon nitride coatings

2004 ◽  
Vol 13 (10) ◽  
pp. 1882-1888 ◽  
Author(s):  
J. Neidhardt ◽  
L. Hultman ◽  
E. Broitman ◽  
T.W. Scharf ◽  
I.L. Singer
Keyword(s):  
Amorphous Carbon ◽  
Carbon Nitride ◽  
Tribological Behavior ◽  
Nitride Coatings ◽  
Amorphous Carbon Nitride

Composition, structure and tribological properties of amorphous carbon nitride coatings

1994 ◽  
Vol 68-69 ◽  
pp. 611-615 ◽  
Author(s):  
Dong Li ◽  
Eric Cutiongco ◽  
Yip-Wah Chung ◽  
Ming-Show Wong ◽  
William D. Sproul
Keyword(s):  
Amorphous Carbon ◽  
Tribological Properties ◽  
Carbon Nitride ◽  
Nitride Coatings ◽  
Amorphous Carbon Nitride ◽  
Composition Structure

Characterization of amorphous carbon nitride by bottom-gated thin-film structure

2006 ◽  
Vol 15 (4-8) ◽  
pp. 1015-1018 ◽  
Author(s):  
Yasuhiko Hayashi ◽  
N. Kamada ◽  
T. Soga ◽  
T. Jimbo
Keyword(s):  
Thin Film ◽  
Amorphous Carbon ◽  
Carbon Nitride ◽  
Film Structure ◽  
Thin Film Structure ◽  
Amorphous Carbon Nitride
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