Characterization of DC Magnetron Sputtering Plasma Used for Deposition of Amorphous Carbon Nitride

2006 ◽  
Author(s):  
Enrique Camps ◽  
Luis Escobar-Alarcón ◽  
J. López ◽  
G. Zambrano ◽  
P. Prieto
Keyword(s):  
Magnetron Sputtering ◽  
Amorphous Carbon ◽  
Carbon Nitride ◽  
Dc Magnetron Sputtering ◽  
Amorphous Carbon Nitride

Characterization of hydrogenated amorphous carbon nitride particles and coatings obtained in a CH4/N2 radiofrequency discharge

2005 ◽  
Vol 482 (1-2) ◽  
pp. 226-231 ◽  
Author(s):  
Jérémy Pereira ◽  
Isabelle Géraud-Grenier ◽  
Véronique Massereau-Guilbaud ◽  
André Plain
Keyword(s):  
Amorphous Carbon ◽  
Carbon Nitride ◽  
Hydrogenated Amorphous Carbon ◽  
Radiofrequency Discharge ◽  
Amorphous Carbon Nitride ◽  
Hydrogenated Amorphous

Influence of Zr Doping on the Tribological Properties of Amorphous Carbon-Nitride Coating

2019 ◽  
Vol 823 ◽  
pp. 9-14
Author(s):  
Yen Liang Su ◽  
Sun Hui Yao ◽  
Yu Chen Lai ◽  
Huang Ming Wu
Keyword(s):  
Magnetron Sputtering ◽  
Amorphous Carbon ◽  
Carbon Nitride ◽  
Tribological Behavior ◽  
Nitride Coating ◽  
Wear Performance ◽  
Amorphous Carbon Nitride ◽  
Pin On Disk ◽  
Nanohardness Tester ◽  
Sputtering System

This study aimed to understand the influence of small amount of Zr doping of amorphous carbonitride (a-CN) coatings on the structure, and mechanical and tribological behavior. The coatings were prepared using a four-target close-field unbalance magnetron sputtering system; two graphite, one Ti and one Zr targets were used. GDOS, SEM, XRD and XPS were used. A surface profilometer, a nanohardness tester, and a pin-on-disk wear tester were used. It was found the Zr doping resulting in the formation of ZrC and ZrN phases within the coating and the increase in the sp3 bonding fraction. The nanohardness was increased and the wear performance was largely improved.

Characterization of amorphous carbon nitride by bottom-gated thin-film structure

2006 ◽  
Vol 15 (4-8) ◽  
pp. 1015-1018 ◽  
Author(s):  
Yasuhiko Hayashi ◽  
N. Kamada ◽  
T. Soga ◽  
T. Jimbo
Keyword(s):  
Thin Film ◽  
Amorphous Carbon ◽  
Carbon Nitride ◽  
Film Structure ◽  
Thin Film Structure ◽  
Amorphous Carbon Nitride
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