Surface modification of ceria nanoparticles and their chemical mechanical polishing behavior on glass substrate
2010 ◽
Vol 256
(12)
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pp. 3856-3861
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2010 ◽
Vol 31
(11)
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pp. 116003
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Keyword(s):
1994 ◽
Vol 29
(17)
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pp. 4554-4558
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Keyword(s):
2010 ◽
Vol 23
(03)
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pp. 276
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2020 ◽
Vol 9
(2)
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pp. 024015
Keyword(s):
2010 ◽
Vol 87
(11)
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pp. 2168-2172
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2010 ◽
Vol 257
(5)
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pp. 1750-1755
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Keyword(s):