Large-area metallic photonic crystal fabrication with interference lithography and dry etching

2005 ◽  
Vol 81 (2-3) ◽  
pp. 271-275 ◽  
Author(s):  
H. C. Guo ◽  
D. Nau ◽  
A. Radke ◽  
X. P. Zhang ◽  
J. Stodolka ◽  
...  
Keyword(s):  
Photonic Crystal ◽  
Dry Etching ◽  
Interference Lithography ◽  
Large Area ◽  
Metallic Photonic Crystal

scholarly journals Combining Interference Lithography and Two-Photon Lithography for Fabricating Large-Area Photonic Crystal Structures with Controlled Defects

2021 ◽  
Vol 11 (14) ◽  
pp. 6559
Author(s):  
Hongsub Jee ◽  
Min-Joon Park ◽  
Kiseok Jeon ◽  
Chaehwan Jeong ◽  
Jaehyeong Lee
Keyword(s):  
Photonic Crystal ◽  
Crystal Structures ◽  
Three Dimensional ◽  
Interference Lithography ◽  
Large Area ◽  
Regular Array ◽  
Two Photon ◽  
Regular Structures ◽  
Patterned Structures ◽  
Fast Processing

Interference lithography is a promising method for fabricating large-area, defect-free three-dimensional photonic crystal structures which can be used for facilitating the realization of photonic devices with a fast processing time. Although they can be used in waveguides, resonators, and detectors, their repeated regular array patterns can only be used for limited applications. In this study, we demonstrate a method for fabricating large-area photonic crystal structures with controlled defects by combining interference lithography and two-photon lithography using a light-curable resin. By combining regular array structures and controlled patterns, monotonous but large-area regular structures can be obtained. Furthermore, the patterned structures have considerable potential for use in various applications, such as solar cells, sensors, photodetectors, micro-/nano-electronics, and cell growth.

Large-area micro/nanostructures fabrication in quartz by laser interference lithography and dry etching

2010 ◽  
Vol 101 (2) ◽  
pp. 237-241 ◽  
Author(s):  
C. H. Liu ◽  
M. H. Hong ◽  
M. C. Lum ◽  
H. Flotow ◽  
F. Ghadessy ◽  
...  
Keyword(s):  
Dry Etching ◽  
Interference Lithography ◽  
Laser Interference Lithography ◽  
Laser Interference ◽  
Large Area

Enhanced light extraction of scintillator using large-area photonic crystal structures fabricated by soft-X-ray interference lithography

2015 ◽  
Vol 106 (24) ◽  
pp. 241901 ◽  
Author(s):  
Zhichao Zhu ◽  
Shuang Wu ◽  
Chaofan Xue ◽  
Jun Zhao ◽  
Liansheng Wang ◽  
...  
Keyword(s):  
Photonic Crystal ◽  
Crystal Structures ◽  
Light Extraction ◽  
Interference Lithography ◽  
Large Area ◽  
X Ray

scholarly journals Thermal emission and design in 2D-periodic metallic photonic crystal slabs

2006 ◽  
Vol 14 (19) ◽  
pp. 8785 ◽  
Author(s):  
David L. C. Chan ◽  
Marin Soljačić ◽  
J. D. Joannopoulos
Keyword(s):  
Photonic Crystal ◽  
Thermal Emission ◽  
Photonic Crystal Slabs ◽  
Metallic Photonic Crystal

Modal analysis of guiding structures patterned in a metallic photonic crystal

1998 ◽  
Vol 73 (19) ◽  
pp. 2712-2714 ◽  
Author(s):  
J. Danglot ◽  
J. Carbonell ◽  
M. Fernandez ◽  
O. Vanbésien ◽  
D. Lippens
Keyword(s):  
Photonic Crystal ◽  
Modal Analysis ◽  
Metallic Photonic Crystal
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