The dry etching of group III-nitride wide-bandgap semiconductors

JOM ◽  
1996 ◽  
Vol 48 (8) ◽  
pp. 50-55 ◽  
Author(s):  
H. P. Gillis ◽  
D. A. Choutov ◽  
K. P. Martin
Keyword(s):  
Dry Etching ◽  
Wide Bandgap ◽  
Wide Bandgap Semiconductors ◽  
Group Iii ◽  
Bandgap Semiconductors ◽  
Group Iii Nitride

scholarly journals Wide-Bandgap Semiconductors: Nanostructures, Defects, and Applications

2015 ◽  
Vol 2015 ◽  
pp. 1-2
Author(s):  
Meiyong Liao ◽  
Thomas Stergiopoulos ◽  
Jose Alvarez ◽  
Surojit Chattopadhyay ◽  
Guihua Zhang
Keyword(s):  
Wide Bandgap ◽  
Wide Bandgap Semiconductors ◽  
Bandgap Semiconductors
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