Thin film silicon on insulator substrates and their application to integrated circuits

1996 ◽  
Vol 25 (1) ◽  
pp. 13-21 ◽  
Author(s):  
S. R. Wilson ◽  
T. Wetteroth ◽  
S. Hong ◽  
H. Shin ◽  
B. Y. Hwang ◽  
...  
Keyword(s):  
Thin Film ◽  
Integrated Circuits ◽  
Silicon On Insulator ◽  
Thin Film Silicon

Leakage current models of thin film silicon-on-insulator devices

1998 ◽  
Vol 72 (10) ◽  
pp. 1199-1201 ◽  
Author(s):  
Hank Shin ◽  
Stella Hong ◽  
Tom Wetteroth ◽  
Syd R. Wilson ◽  
Dieter K. Schroder
Keyword(s):  
Thin Film ◽  
Leakage Current ◽  
Silicon On Insulator ◽  
Thin Film Silicon

ChemInform Abstract: Novel Approach to Defect Etching in Thin Film Silicon-on-Insulator.

ChemInform ◽  
2010 ◽  
Vol 24 (42) ◽  
pp. no-no
Author(s):  
H. GASSEL ◽  
J. PETER-WEIDEMANN ◽  
H. VOGT
Keyword(s):  
Thin Film ◽  
Silicon On Insulator ◽  
Thin Film Silicon ◽  
Novel Approach

ULSI-quality gate oxide on thin-film-silicon-on-insulator

2002 ◽  
Author(s):  
W.M. Huang ◽  
Z.J. Ma ◽  
M. Racanelli ◽  
D. Hughes ◽  
S. Ajuria ◽  
...  
Keyword(s):  
Thin Film ◽  
Gate Oxide ◽  
Silicon On Insulator ◽  
Thin Film Silicon
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