Characterization of front and back Si-SiO/sub 2/ interfaces in thick- and thin-film silicon-on-insulator MOS structures by the charge-pumping technique

1989 ◽  
Vol 36 (9) ◽  
pp. 1746-1750 ◽  
Author(s):  
D.J. Wouters ◽  
M.R. Tack ◽  
G.V. Groeseneken ◽  
H.E. Maes ◽  
C.L. Claeys
Keyword(s):  
Thin Film ◽  
Silicon On Insulator ◽  
Charge Pumping ◽  
Thin Film Silicon ◽  
Mos Structures

Leakage current models of thin film silicon-on-insulator devices

1998 ◽  
Vol 72 (10) ◽  
pp. 1199-1201 ◽  
Author(s):  
Hank Shin ◽  
Stella Hong ◽  
Tom Wetteroth ◽  
Syd R. Wilson ◽  
Dieter K. Schroder
Keyword(s):  
Thin Film ◽  
Leakage Current ◽  
Silicon On Insulator ◽  
Thin Film Silicon

ChemInform Abstract: Novel Approach to Defect Etching in Thin Film Silicon-on-Insulator.

ChemInform ◽  
2010 ◽  
Vol 24 (42) ◽  
pp. no-no
Author(s):  
H. GASSEL ◽  
J. PETER-WEIDEMANN ◽  
H. VOGT
Keyword(s):  
Thin Film ◽  
Silicon On Insulator ◽  
Thin Film Silicon ◽  
Novel Approach

Characterization of thin-film silicon formed by high-speed zone-melting recrystallization process

1997 ◽  
Vol 48 (1-4) ◽  
pp. 261-267 ◽  
Author(s):  
H. Naomoto ◽  
S. Hamamoto ◽  
A. Takami ◽  
S. Arimoto ◽  
T. Ishihara
Keyword(s):  
Thin Film ◽  
High Speed ◽  
Zone Melting ◽  
Recrystallization Process ◽  
Thin Film Silicon
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