Mathematical simulation of gas-phase deposition of epitaxial silicon films in the Si-C-H and Si-H systems

1995 ◽  
Vol 44 (7) ◽  
pp. 1171-1176
Author(s):  
V. G. Minkina
Keyword(s):  
Mathematical Simulation ◽  
Gas Phase ◽  
Silicon Films ◽  
Epitaxial Silicon ◽  
Gas Phase Deposition

HYDROGEN PROFILING IN GAS PHASE DOPED AND ION IMPLANTED AMORPHOUS SILICON FILMS

1981 ◽  
Vol 42 (C4) ◽  
pp. C4-779-C4-782 ◽  
Author(s):  
F. J. Demond ◽  
G. Müller ◽  
H. Damjantschitsch ◽  
H. Mannsperger ◽  
S. Kalbitzer ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Gas Phase ◽  
Silicon Films ◽  
Ion Implanted

Far-infrared free-hole absorption in epitaxial silicon films for homojunction detectors

1997 ◽  
Vol 71 (4) ◽  
pp. 515-517 ◽  
Author(s):  
A. G. U. Perera ◽  
W. Z. Shen ◽  
W. C. Mallard ◽  
M. O. Tanner ◽  
K. L. Wang
Keyword(s):  
Far Infrared ◽  
Silicon Films ◽  
Epitaxial Silicon ◽  
Free Hole

Ultra-low-loss double-cladding laser fiber fabricated by optimized chelate gas phase deposition technique

2018 ◽  
Vol 57 (27) ◽  
pp. 7943 ◽  
Author(s):  
Shengfei She ◽  
Weinan Li ◽  
Chang Chang ◽  
Zhe Li ◽  
Jinkun Zheng ◽  
...  
Keyword(s):  
Gas Phase ◽  
Deposition Technique ◽  
Low Loss ◽  
Laser Fiber ◽  
Gas Phase Deposition

scholarly journals Gas-phase deposition of cavitation-resistant coatings based on boron carbide

2018 ◽  
Vol 9 (4) ◽  
pp. 368-372
Author(s):  
A. Yu. Zhuravlov ◽  
◽  
A. V. Shijan ◽  
B. M. Shirokov ◽  
◽  
...  
Keyword(s):  
Boron Carbide ◽  
Gas Phase ◽  
Gas Phase Deposition
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