Investigation of high concentration effects of Sb and P in silicon by combination of SIMS and TEM
1989 ◽
Vol 333
(3)
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pp. 191-202
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2001 ◽
Vol 22
(1)
◽
pp. 69-76
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2015 ◽
Vol 112
(26)
◽
pp. 7990-7995
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Keyword(s):
Keyword(s):
1994 ◽
Vol 3
(3)
◽
pp. 292-301
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