Study of the growth of thin nitride films under low-energy nitrogen-ion bombardment
1994 ◽
Vol 58
(4)
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pp. 395-399
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Keyword(s):
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2001 ◽
Vol 185
(1-4)
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pp. 267-275
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1985 ◽
Vol 69
(2)
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pp. 473-481
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2016 ◽
Vol 49
(7)
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pp. 075301
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Keyword(s):
2001 ◽
Vol 175-177
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pp. 699-704
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Keyword(s):
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2010 ◽
Vol 28
(6)
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pp. 533-539
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