Prepared Low Stress Cubic Boron Nitride Film by Physical Vapor Deposition

2002 ◽  
Vol 167 (2) ◽  
pp. 420-424
Author(s):  
P.W. Zhu ◽  
Y.N. Zhao ◽  
B. Wang ◽  
Z. He ◽  
D.M. Li ◽  
...  
Keyword(s):  
Boron Nitride ◽  
Vapor Deposition ◽  
Physical Vapor Deposition ◽  
Cubic Boron Nitride ◽  
Nitride Film

Recent Advances in Cubic Boron Nitride Deposition

MRS Bulletin ◽  
2003 ◽  
Vol 28 (3) ◽  
pp. 184-188 ◽  
Author(s):  
W.J. Zhang ◽  
I. Bello ◽  
Y. Lifshitz ◽  
S. T. Lee
Keyword(s):  
Boron Nitride ◽  
Crystallite Size ◽  
Vapor Deposition ◽  
Physical Vapor Deposition ◽  
Recent Progress ◽  
Cubic Boron Nitride ◽  
Chemical Vapor ◽  
Limited Success ◽  
Ion Impact ◽  
Small Crystallite

AbstractThis article reviews recent progress in the deposition of thick, adherent, cubic boron nitride (c-BN) films. Most of the previous work applied ion-assisted physical vapor deposition methods to deposit c-BN films. The ion impact was successful in nucleating c-BN crystallites, but it resulted in a very small crystallite size and introduced stress, which caused the delamination of films thicker than 100 nm. Recent efforts to reduce the stress and obtain thicker films are described. The limited success of these attempts motivated us to explore chemical vapor deposition methods based on fluorine chemistry. We review this work, detailing the success of depositing thick (>20 μ), stress-free, adherent films with a larger crystallite size and significantly better crystalline quality.

Twin structures of rhombohedral and cubic boron nitride prepared by chemical vapor deposition method

2003 ◽  
Vol 12 (3-7) ◽  
pp. 1138-1145 ◽  
Author(s):  
Takeo Oku ◽  
Kenji Hiraga ◽  
Toshitsugu Matsuda ◽  
Toshio Hirai ◽  
Makoto Hirabayashi
Keyword(s):  
Chemical Vapor Deposition ◽  
Boron Nitride ◽  
Vapor Deposition ◽  
Cubic Boron Nitride ◽  
Chemical Vapor ◽  
Chemical Vapor Deposition Method ◽  
Deposition Method

scholarly journals Recent progress in cubic boron nitride film synthesis

2009 ◽  
Vol 58 (2) ◽  
pp. 1364
Author(s):  
Yang Hang-Sheng ◽  
Nie An-Min ◽  
Zhang Jian-Ying
Keyword(s):  
Boron Nitride ◽  
Recent Progress ◽  
Cubic Boron Nitride ◽  
Nitride Film ◽  
Film Synthesis

scholarly journals Synthesis of Multiwall Boron Nitride (BN) Nanotubes by a PVD Method Based on Vapor–Liquid–Solid Growth

Materials ◽  
2020 ◽  
Vol 13 (4) ◽  
pp. 915 ◽  
Author(s):  
Hao Guo ◽  
Yonggang Xu ◽  
Hetuo Chen ◽  
Zhengjuan Wang ◽  
Xiaojian Mao ◽  
...  
Keyword(s):  
Boron Nitride ◽  
Vapor Deposition ◽  
Physical Vapor Deposition ◽  
Liquid Drop ◽  
Synthesis Temperature ◽  
Vapor Liquid Solid ◽  
Vls Growth ◽  
Typical Length ◽  
Bn Nanotubes ◽  
Vapor Liquid

Multiwall boron nitride (BN) nanotubes were synthesized by a novel physical vapor deposition (PVD) method, in which the BN nanotubes grow on a compact substrate composed of AlN, γ-Al2O3, Y2O3, and carbon powders. The obtained BN nanotubes assemble in an orderly manner with a typical length of over one millimeter and a diameter of one-hundred nanometers. The hollow multiwall tubes have a spherical tip, which is presumed to be a liquid drop at the synthesis temperature, indicating the vapor–liquid–solid (VLS) growth mechanism.

scholarly journals Review of advances in cubic boron nitride film synthesis

1997 ◽  
Vol 21 (2) ◽  
pp. 47-100 ◽  
Author(s):  
P.B. Mirkarimi ◽  
K.F. McCarty ◽  
D.L. Medlin
Keyword(s):  
Boron Nitride ◽  
Cubic Boron Nitride ◽  
Nitride Film ◽  
Film Synthesis
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