An effect of measurement conditions on the depth resolution for low-energy dual-beam depth profiling using TOF-SIMS

2013 ◽  
Vol 45 (8) ◽  
pp. 1261-1265 ◽  
Author(s):  
Atsushi Murase ◽  
Takuya Mitsuoka ◽  
Mitsuhiro Tomita ◽  
Hisataka Takenaka ◽  
Hiromi Morita
Keyword(s):  
Depth Profiling ◽  
Depth Resolution ◽  
Low Energy ◽  
Tof Sims ◽  
Dual Beam ◽  
Beam Depth

Cesium/xenon dual beam depth profiling with TOF-SIMS: measurement and modeling of M+, MCs+, and M2Cs2+ yields

2004 ◽  
Vol 231-232 ◽  
pp. 749-753 ◽  
Author(s):  
J. Brison ◽  
T. Conard ◽  
W. Vandervorst ◽  
L. Houssiau
Keyword(s):  
Depth Profiling ◽  
Tof Sims ◽  
Dual Beam ◽  
Beam Depth

Chemical Microcharacterization of Ultrathin Iodide Conversion Layers and Adsorbed Thiocyanate Surface Layers on Silver Halide Microcrystals with Time-of-Flight SIMS

2002 ◽  
Vol 8 (3) ◽  
pp. 216-226 ◽  
Author(s):  
Geert Verlinden ◽  
Renaat Gijbels ◽  
Ingrid Geuens
Keyword(s):  
Secondary Ion Mass Spectrometry ◽  
Silver Halide ◽  
Time Of Flight ◽  
Depth Profiling ◽  
Analytical Techniques ◽  
Crystal Surfaces ◽  
Surface Layers ◽  
Tof Sims ◽  
Dual Beam ◽  
Beam Depth

The technique of imaging time-of-flight secondary ion mass spectrometry (TOF-SIMS) and dual beam depth profiling has been used to study the composition of the surface of tabular silver halide microcrystals. Analysis of individual microcrystals with a size well below 1 μm from a given emulsion is possible. The method is successfully applied for the characterization of silver halide microcrystals with subpercent global iodide concentrations confined in surface layers with a thickness below 5 nm. The developed TOF-SIMS analytical procedure is explicitly demonstrated for the molecular imaging of adsorbed thiocyanate layers (SCN) at crystal surfaces of individual crystals and for the differentiation of iodide conversion layers synthesized with KI and with AgI micrates (nanocrystals with a size between 10 and 50 nm). It can be concluded that TOF-SIMS as a microanalytical, surface-sensitive technique has some unique properties over other analytical techniques for the study of complex structured surface layers of silver halide microcrystals. This offers valuable information to support the synthesis of future photographic emulsions.

High Resolution Auger Depth Profiles Using a Dual Ion Gun System

1985 ◽  
Vol 54 ◽  
Author(s):  
S. Ingrey ◽  
J.P.D. Cook
Keyword(s):  
Electron Beam ◽  
Depth Profiling ◽  
Depth Resolution ◽  
Grazing Incidence ◽  
Low Energy ◽  
Multilayer Structures ◽  
Dramatic Decrease ◽  
Depth Profiles ◽  
Order Of Magnitude ◽  
Magnitude Improvement

A dual ion gun system has been proposed (D.E. Sykes et al, Appl. Surf. Sci. 5(1980)103) to reduce texturing and improve depth resolution during Auger sputter depth profiling. We have evaluated this ion gun configuration by profiling a variety of multilayer structures. With careful alignment of the guns, we have obtained a dramatic decrease in ion-induced texturing often seen when a single ion gun is used. This effect was particularly pronounced for polycrystalline Al films on Si where an order of magnitude improvement in depth resolution was achieved. Further refinements of the technique include the use of low energy (IkeV) grazing incidence xenon ions and a small electron beam probe area. Depth profiles obtained from Ni/Cr, W/Si, and GaAs/GaAlAs multilayer structures will also be discussed.

scholarly journals Sub-nm depth resolution in sputter depth profiling by low energy ion bombardment

2004 ◽  
Vol 2 ◽  
pp. 24-27
Author(s):  
Hyung-Ik Lee ◽  
Dae Won Moon ◽  
Suhk Kun Oh ◽  
Hee Jae Kang ◽  
Hyun Kyong Kim ◽  
...  
Keyword(s):  
Depth Profiling ◽  
Depth Resolution ◽  
Ion Bombardment ◽  
Low Energy

Dual beam depth profiling of polymer materials: comparison of C60and Ar cluster ion beams for sputtering

2012 ◽  
Vol 45 (1) ◽  
pp. 171-174 ◽  
Author(s):  
D. Rading ◽  
R. Moellers ◽  
H.-G. Cramer ◽  
E. Niehuis
Keyword(s):  
Depth Profiling ◽  
Ion Beams ◽  
Polymer Materials ◽  
Dual Beam ◽  
Beam Depth ◽  
Cluster Ion Beams ◽  
Cluster Ion
Sign in / Sign up

Export Citation Format

Share Document