Removal of Ar+ beam-induced damaged layers from polyimide surfaces with argon gas cluster ion beams

2010 ◽  
Vol 42 (9) ◽  
pp. 1453-1457 ◽  
Author(s):  
Takuya Miyayama ◽  
Noriaki Sanada ◽  
Scott R. Bryan ◽  
John S. Hammond ◽  
Mineharu Suzuki
Keyword(s):  
Ion Beams ◽  
Argon Gas ◽  
Cluster Ion Beams ◽  
Cluster Ion

Sputtering Yields for Gold Using Argon Gas Cluster Ion Beams

2012 ◽  
Vol 116 (44) ◽  
pp. 23735-23741 ◽  
Author(s):  
Li Yang ◽  
Martin P. Seah ◽  
Ian S. Gilmore
Keyword(s):  
Ion Beams ◽  
Argon Gas ◽  
Cluster Ion Beams ◽  
Cluster Ion ◽  
Sputtering Yields

scholarly journals Improved mass resolution and mass accuracy in TOF-SIMS spectra and images using argon gas cluster ion beams

2016 ◽  
Vol 11 (2) ◽  
pp. 02A321 ◽  
Author(s):  
Hyun Kyong Shon ◽  
Sohee Yoon ◽  
Jeong Hee Moon ◽  
Tae Geol Lee
Keyword(s):  
Mass Accuracy ◽  
Ion Beams ◽  
Mass Resolution ◽  
Argon Gas ◽  
Tof Sims ◽  
Cluster Ion Beams ◽  
Cluster Ion

Molecular Depth Profiling with Argon Gas Cluster Ion Beams

2015 ◽  
Vol 119 (27) ◽  
pp. 15316-15324 ◽  
Author(s):  
Kan Shen ◽  
Andreas Wucher ◽  
Nicholas Winograd
Keyword(s):  
Depth Profiling ◽  
Ion Beams ◽  
Argon Gas ◽  
Molecular Depth Profiling ◽  
Cluster Ion Beams ◽  
Cluster Ion

TOF-SIMS with Argon Gas Cluster Ion Beams: A Comparison with C60+

2011 ◽  
Vol 83 (10) ◽  
pp. 3793-3800 ◽  
Author(s):  
Sadia Rabbani ◽  
Andrew M. Barber ◽  
John S. Fletcher ◽  
Nicholas P. Lockyer ◽  
John C. Vickerman
Keyword(s):  
Ion Beams ◽  
Argon Gas ◽  
Tof Sims ◽  
Cluster Ion Beams ◽  
Cluster Ion

Cu pattern etching by oxygen gas cluster ion beams with acetic acid vapor

2014 ◽  
Author(s):  
N. Toyoda ◽  
M. Kojima ◽  
R. Hinoura ◽  
A. Yamaguchi ◽  
K. Hara ◽  
...  
Keyword(s):  
Acetic Acid ◽  
Ion Beams ◽  
Acid Vapor ◽  
Cluster Ion Beams ◽  
Cluster Ion ◽  
Oxygen Gas
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