Linear antenna microwave plasma CVD diamond deposition at the edge of no-growth region of CHO ternary diagram

2012 ◽  
Vol 249 (12) ◽  
pp. 2612-2615 ◽  
Author(s):  
Štěpán Potocký ◽  
Oleg Babchenko ◽  
Karel Hruška ◽  
Alexander Kromka
Keyword(s):  
Microwave Plasma ◽  
Cvd Diamond ◽  
Ternary Diagram ◽  
Linear Antenna ◽  
Plasma Cvd ◽  
Diamond Deposition ◽  
Growth Region ◽  
Microwave Plasma Cvd

scholarly journals Synthesis of Microwave Plasma CVD Diamond-Film on Variously-Coated Carbon-Steel Substrates.

1996 ◽  
Vol 47 (7) ◽  
pp. 611-615
Author(s):  
Hiroyuki TANAKA ◽  
Toshiaki TANAKA ◽  
Hideaki SOHMA ◽  
Masato YOSHIDA ◽  
Akira SAKAI ◽  
...  
Keyword(s):  
Carbon Steel ◽  
Diamond Film ◽  
Microwave Plasma ◽  
Cvd Diamond ◽  
Plasma Cvd ◽  
Microwave Plasma Cvd ◽  
Cvd Diamond Film ◽  
Steel Substrates ◽  
Coated Carbon

Growth of carbon allotropes and plasma characterization in linear antenna microwave plasma CVD system

2014 ◽  
Vol 53 (5S1) ◽  
pp. 05FP04 ◽  
Author(s):  
Štěpán Potocký ◽  
Oleg Babchenko ◽  
Marina Davydova ◽  
Tibor Izak ◽  
Martin Čada ◽  
...  
Keyword(s):  
Microwave Plasma ◽  
Linear Antenna ◽  
Plasma Cvd ◽  
Carbon Allotropes ◽  
Microwave Plasma Cvd ◽  
Plasma Characterization

Linear antenna microwave plasma CVD deposition of diamond films over large areas

Vacuum ◽  
2012 ◽  
Vol 86 (6) ◽  
pp. 776-779 ◽  
Author(s):  
A. Kromka ◽  
O. Babchenko ◽  
T. Izak ◽  
K. Hruska ◽  
B. Rezek
Keyword(s):  
Microwave Plasma ◽  
Diamond Films ◽  
Linear Antenna ◽  
Plasma Cvd ◽  
Microwave Plasma Cvd

Microwave plasma CVD diamond layers on three-dimensional structured Si for protective coating

2002 ◽  
Vol 11 (3-6) ◽  
pp. 519-522 ◽  
Author(s):  
H. Csorbai ◽  
A. Kováts ◽  
S. Kátai ◽  
G. Hárs ◽  
C. Dücso ◽  
...  
Keyword(s):  
Protective Coating ◽  
Microwave Plasma ◽  
Three Dimensional ◽  
Cvd Diamond ◽  
Plasma Cvd ◽  
Microwave Plasma Cvd

Adhesion and Young's Modulus of CVD Diamond Thin Films Grown Over Various Substrates

1995 ◽  
Vol 383 ◽  
Author(s):  
R. Ramesham ◽  
R. F. Askew ◽  
M. F. Rose
Keyword(s):  
Thin Films ◽  
Young’S Modulus ◽  
Microwave Plasma ◽  
Young's Modulus ◽  
Diamond Films ◽  
Cvd Diamond ◽  
Gas Mixture ◽  
Cantilever Beams ◽  
Plasma Cvd ◽  
Microwave Plasma Cvd

ABSTRACTDiamond films were deposited by microwave plasma CVD using H2 and CH4 gas mixture over various substrate materials such as Si, Pd, Be, Cu, Mo, AIN, SiO2, Si3N4, Al2O3, Sapphire, Quartz, Ni-base alloys, single crystal Ni, boron nitride, and Ti. We have used a Z-axis pull stud test to determine adhesion strength of diamond film to some of the substrates. Our observations on the adhesion of diamond films to the above substrates are reported. A method will be described to evaluate Young's modulus of CVD diamond films using fabricated diamond cantilever beams.

Hot Spot Formation in Microwave Plasma CVD Diamond Synthesis

2011 ◽  
Vol 39 (11) ◽  
pp. 2790-2791 ◽  
Author(s):  
Kadek W. Hemawan ◽  
Chih S. Yan ◽  
Qi Liang ◽  
Joseph Lai ◽  
Yufei Meng ◽  
...  
Keyword(s):  
Microwave Plasma ◽  
Hot Spot ◽  
Cvd Diamond ◽  
Diamond Synthesis ◽  
Plasma Cvd ◽  
Microwave Plasma Cvd ◽  
Hot Spot Formation ◽  
Spot Formation
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