Optical study of defects in nano-diamond films grown in linear antenna microwave plasma CVD from H2/CH4/CO2gas mixture

2012 ◽  
Vol 249 (12) ◽  
pp. 2635-2639 ◽  
Author(s):  
M. Varga ◽  
Z. Remes ◽  
O. Babchenko ◽  
A. Kromka
Keyword(s):  
Microwave Plasma ◽  
Diamond Films ◽  
Optical Study ◽  
Linear Antenna ◽  
Plasma Cvd ◽  
Microwave Plasma Cvd

Linear antenna microwave plasma CVD deposition of diamond films over large areas

Vacuum ◽  
2012 ◽  
Vol 86 (6) ◽  
pp. 776-779 ◽  
Author(s):  
A. Kromka ◽  
O. Babchenko ◽  
T. Izak ◽  
K. Hruska ◽  
B. Rezek
Keyword(s):  
Microwave Plasma ◽  
Diamond Films ◽  
Linear Antenna ◽  
Plasma Cvd ◽  
Microwave Plasma Cvd

Deposition of large area uniform diamond films by microwave plasma CVD

Vacuum ◽  
2018 ◽  
Vol 147 ◽  
pp. 134-142 ◽  
Author(s):  
J. Weng ◽  
F. Liu ◽  
L.W. Xiong ◽  
J.H. Wang ◽  
Q. Sun
Keyword(s):  
Microwave Plasma ◽  
Diamond Films ◽  
Plasma Cvd ◽  
Large Area ◽  
Microwave Plasma Cvd

High-speed synthesis of heavily boron-doped diamond films by in-liquid microwave plasma CVD

2019 ◽  
Vol 92 ◽  
pp. 41-46 ◽  
Author(s):  
Yohei Harada ◽  
Ryota Hishinuma ◽  
Nicolae Spătaru ◽  
Yusei Sakurai ◽  
Kazuya Miyasaka ◽  
...  
Keyword(s):  
High Speed ◽  
Microwave Plasma ◽  
Diamond Films ◽  
Plasma Cvd ◽  
Boron Doped Diamond ◽  
Boron Doped ◽  
Microwave Plasma Cvd

Linear antenna microwave plasma CVD diamond deposition at the edge of no-growth region of CHO ternary diagram

2012 ◽  
Vol 249 (12) ◽  
pp. 2612-2615 ◽  
Author(s):  
Štěpán Potocký ◽  
Oleg Babchenko ◽  
Karel Hruška ◽  
Alexander Kromka
Keyword(s):  
Microwave Plasma ◽  
Cvd Diamond ◽  
Ternary Diagram ◽  
Linear Antenna ◽  
Plasma Cvd ◽  
Diamond Deposition ◽  
Growth Region ◽  
Microwave Plasma Cvd

Thermal Conductivity of Diamond Films Synthesized by Microwave Plasma CVD

1986 ◽  
Vol 25 (Part 2, No. 10) ◽  
pp. L808-L810 ◽  
Author(s):  
Akira Ono ◽  
Tetsuya Baba ◽  
Hiroyuki Funamoto ◽  
Akira Nishikawa
Keyword(s):  
Thermal Conductivity ◽  
Microwave Plasma ◽  
Diamond Films ◽  
Plasma Cvd ◽  
Microwave Plasma Cvd

Growth of carbon allotropes and plasma characterization in linear antenna microwave plasma CVD system

2014 ◽  
Vol 53 (5S1) ◽  
pp. 05FP04 ◽  
Author(s):  
Štěpán Potocký ◽  
Oleg Babchenko ◽  
Marina Davydova ◽  
Tibor Izak ◽  
Martin Čada ◽  
...  
Keyword(s):  
Microwave Plasma ◽  
Linear Antenna ◽  
Plasma Cvd ◽  
Carbon Allotropes ◽  
Microwave Plasma Cvd ◽  
Plasma Characterization

Electrical Contacts to Polycrystalline B Doped Diamond Films

1989 ◽  
Vol 162 ◽  
Author(s):  
K. Nishimura ◽  
K. Das ◽  
M. Iwase ◽  
J. T. Glass ◽  
K. Kobashi
Keyword(s):  
Carrier Concentration ◽  
Room Temperature ◽  
Microwave Plasma ◽  
Diamond Films ◽  
Electrical Contacts ◽  
Plasma Cvd ◽  
Microwave Plasma Cvd ◽  
Order Of Magnitude

ABSTRACTB doped diamond films were synthesized by microwave plasma CVD and electrical contacts were fabricated by R F sputtering. Rc was obtained for Pt, Ni, TaSi2, and Al asdeposited contacts at room temperature. Pt gave the minimum Rc and Al gave the maximum Rc of the metals investigated on films containing a carrier concentration of 5 × 1018/cm3. The minimum Rc, 8.6 × 10−4 Ω cm 2, was obtained on heavily B doped diamond films with a carrier concentration of 2.7 × 1020/cm3. After nnealing at 400 °C, the Rc of Pt contacts on B doped diamond films with a resistivity of 2×104 Ω1 cm decreased by approximately one order of magnitude.

Sign in / Sign up

Export Citation Format

Share Document