A new and simple ion source for ion beam assisted deposition of thin films

1991 ◽  
Vol 127 (1) ◽  
pp. K19-K23 ◽  
Author(s):  
R. Hübler ◽  
W. H. Schreiner ◽  
I. J. R. Baumvol
Author(s):  
Dudley M. Sherman ◽  
Thos. E. Hutchinson

The in situ electron microscope technique has been shown to be a powerful method for investigating the nucleation and growth of thin films formed by vacuum vapor deposition. The nucleation and early stages of growth of metal deposits formed by ion beam sputter-deposition are now being studied by the in situ technique.A duoplasmatron ion source and lens assembly has been attached to one side of the universal chamber of an RCA EMU-4 microscope and a sputtering target inserted into the chamber from the opposite side. The material to be deposited, in disc form, is bonded to the end of an electrically isolated copper rod that has provisions for target water cooling. The ion beam is normal to the microscope electron beam and the target is placed adjacent to the electron beam above the specimen hot stage, as shown in Figure 1.


2016 ◽  
Vol 185 ◽  
pp. 295-298 ◽  
Author(s):  
Lin-Ao Zhang ◽  
Hao-Nan Liu ◽  
Xiao-Xia Suo ◽  
Shuo Tong ◽  
Ying-Lan Li ◽  
...  

2005 ◽  
Vol 492 (1-2) ◽  
pp. 203-206 ◽  
Author(s):  
Zhi Yan ◽  
Zhi Tang Song ◽  
Wei Li Liu ◽  
Qing Wan ◽  
Fu Min Zhang ◽  
...  

2021 ◽  
Vol 10 ◽  
pp. 37-46
Author(s):  
G. S. Burkhanov ◽  
◽  
S. A. Lachenkov ◽  
M. A. Kononov ◽  
A. U. Bashlakov ◽  
...  

Changes in the electrical conductivity of a wide range of materials with different crystal-chemical types and electrophysical properties (quartz, glass, molybdenum disulfide, graphite, gold) under continuous proton injection are studied. Film samples of layered MoS2 and graphite compounds were obtained on rough surfaces of glass or quartz by mechanical rubbing of powder. Gold films are formed on glass substrates by magnetron sputtering of a gold target. To create a continuous stream of protons injected into the test sample, a stationary ion source with a cold cathode and a magnetic field forming an ion beam of relatively low intensity was used. The current in the ion beam is up to 1.2 mA, the pressure of hydrogen in the chamber is ~10 – 2 Pa, the energy of hydrogen ions is from 1 to 4 keV. The experimental results indicate that under conditions of continuous proton injection, the electrical conductivity of thin films with a layered structure (MoS2 and graphite) increases sharply (by 4 – 5 orders of magnitude). This effect increases when the temperature decreases from ~ 293 to ~ 77 K, as well as when the number of charges supplied to the sample increases. In the case of continuous injection of protons into massive dielectrics (glass, quartz) and thin films of gold, no noticeable change in electrical conductivity was detected.


2011 ◽  
Vol 202 (1-3) ◽  
pp. 47-55
Author(s):  
P. Prieto ◽  
M. Monti ◽  
J. de la Figuera ◽  
J. M. Sanz ◽  
J. F. Marco

1996 ◽  
Vol 288 (1-2) ◽  
pp. 300-308 ◽  
Author(s):  
Y. Gotoh ◽  
H. Yoshii ◽  
T. Amioka ◽  
K. Kameyama ◽  
H. Tsuji ◽  
...  

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