Radial-Profile Control of Cylindrical Plasma Source With Multiple Low-Inductance Antenna Units
2009 ◽
Vol 6
(S1)
◽
pp. S278-S281
◽
Keyword(s):
1999 ◽
Vol 8
(1)
◽
pp. 79-87
◽
2008 ◽
Vol 202
(22-23)
◽
pp. 5238-5241
◽
2005 ◽
Vol 82
(2)
◽
pp. 129-135
◽
Keyword(s):
1996 ◽
Vol 14
(4)
◽
pp. 2510
◽
Keyword(s):
1998 ◽
Vol 08
(PR7)
◽
pp. Pr7-195-Pr7-203