Comparison of advanced plasma sources for etching applications. V. Polysilicon etching rate, uniformity, profile control, and bulk plasma properties in a helical resonator plasma source

1996 ◽  
Vol 14 (4) ◽  
pp. 2510 ◽  
Author(s):  
J. T. C. Lee
Keyword(s):  
Etching Rate ◽  
Plasma Source ◽  
Plasma Properties ◽  
Plasma Sources ◽  
Profile Control ◽  
Bulk Plasma

Long-pulse plasma source for SMOLA helical mirror

2021 ◽  
Vol 87 (2) ◽  
Author(s):  
Ivan A. Ivanov ◽  
V. O. Ustyuzhanin ◽  
A. V. Sudnikov ◽  
A. Inzhevatkina
Keyword(s):  
Magnetic Field ◽  
Gas Flow ◽  
Supply Voltage ◽  
Hydrogen Plasma ◽  
Plasma Source ◽  
Lanthanum Hexaboride ◽  
Plasma Stream ◽  
Plasma Parameters ◽  
Plasma Properties ◽  
Plasma Gun

A plasma gun for forming a plasma stream in the open magnetic mirror trap with additional helicoidal field SMOLA is described. The plasma gun is an axisymmetric system with a planar circular hot cathode based on lanthanum hexaboride and a hollow copper anode. The two planar coils are located around the plasma source and create a magnetic field of up to 200 mT. The magnetic field forms the magnetron configuration of the discharge and provides a radial electric insulation. The source typically operates with a discharge current of up to 350 A in hydrogen. Plasma parameters in the SMOLA device are Ti ~ 5 eV, Te ~ 5–40 eV and ni ~ (0.1–1)  × 1019 m−3. Helium plasma can also be created. The plasma properties depend on the whole group of initial technical parameters: the cathode temperature, the feeding gas flow, the anode-cathode supply voltage and the magnitude of the cathode magnetic insulation.

Multifunctional bulk plasma source based on discharge with electron injection

2013 ◽  
Vol 84 (1) ◽  
pp. 013307 ◽  
Author(s):  
A. S. Klimov ◽  
A. V. Medovnik ◽  
A. V. Tyunkov ◽  
K. P. Savkin ◽  
M. V. Shandrikov ◽  
...  
Keyword(s):  
Electron Injection ◽  
Plasma Source ◽  
Bulk Plasma

scholarly journals Inhibition of methicillin resistant Staphylococcus aureus by a plasma needle

Open Physics ◽  
2014 ◽  
Vol 12 (3) ◽  
Author(s):  
Maja Miletić ◽  
Dragana Vuković ◽  
Irena Živanović ◽  
Ivana Dakić ◽  
Ivan Soldatović ◽  
...  
Keyword(s):  
Staphylococcus Aureus ◽  
Atmospheric Pressure ◽  
Methicillin Resistant Staphylococcus Aureus ◽  
Plasma Chemistry ◽  
Atmospheric Pressure Plasma ◽  
Plasma Source ◽  
Methicillin Resistant ◽  
Plasma Sources ◽  
Equilibrium Plasma ◽  
Plasma Needle

AbstractIn numerous recent papers plasma chemistry of non equilibrium plasma sources operating at atmospheric pressure has been linked to plasma medical effects including sterilization. In this paper we present a study of the effectiveness of an atmospheric pressure plasma source, known as plasma needle, in inhibition of the growth of biofilm produced by methicillin resistant Staphylococcus aureus (MRSA). Even at the lowest powers the biofilms formed by inoculi of MRSA of 104 and 105 CFU have been strongly affected by plasma and growth in biofilms was inhibited. The eradication of the already formed biofilm was not achieved and it is required to go to more effective sources.

Plasma properties of a new surface-wave-sustained plasma source under the conditions of depositing DLC films

2006 ◽  
Vol 201 (1-2) ◽  
pp. 408-412 ◽  
Author(s):  
Junqi Xu ◽  
Hiroyuki Kousaka ◽  
Noritsugu Umehara ◽  
Dongfeng Diao
Keyword(s):  
Surface Wave ◽  
Plasma Source ◽  
Plasma Properties

scholarly journals Inkjet-printed Plasma Sheet: From Manufacturing to Application

2021 ◽  
Author(s):  
Jinwoo Kim ◽  
Sanghoo Park ◽  
Wonho Choe
Keyword(s):  
Inkjet Printing ◽  
Plasma Source ◽  
Continuous Operation ◽  
High Dimensional ◽  
Plasma Reactors ◽  
Health Crisis ◽  
New Normal ◽  
Plasma Sources ◽  
Term Operation

Abstract The global health crisis caused by the recent pandemic has led to increasing social demand for ‘new normal’ sanitizing and disinfecting facilities to fit our ‘new normal’ lives. Here, we introduce an inkjet-printed, thin-film plasma source applicable to dry disinfection processes. In contrast to conventional plasma reactors, the merits of plasma produced on a film include disposability, cost-effectiveness, and applicability to high-dimensional objects such as the human body. The developed flexible plasma film can be applied to a wide variety of shapes via origami — remaining plasma stable even when bent. However, electrode dissipation has been a practical issue in the long-term operation of inkjet-printed plasma sources, which is troublesome from application perspectives. We focus on making the inkjet-printed electrode more plasma stress-resistant, thereby increasing its lifespan from a few minutes to two hours of continuous operation with optimal inkjet printing and passivation, thus increasing the practicality of the source. Considering the fact that ozone and nitrogen oxides are selectively produced by plasma, we implement a disposable pouch-type plasma source and examine its usefulness in extending the shelf life of food.

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