Bulk and surface passivation of silicon solar cells accomplished by silicon nitride deposited on industrial scale by microwave PECVD

2005 ◽  
Vol 13 (7) ◽  
pp. 551-569 ◽  
Author(s):  
Wim Soppe ◽  
Henk Rieffe ◽  
Arthur Weeber
Keyword(s):  
Solar Cells ◽  
Silicon Nitride ◽  
Surface Passivation ◽  
Industrial Scale ◽  
Silicon Solar Cells ◽  
Microwave Pecvd

Manipulation of K center charge states in silicon nitride films to achieve excellent surface passivation for silicon solar cells

2014 ◽  
Vol 104 (5) ◽  
pp. 053503 ◽  
Author(s):  
Vivek Sharma ◽  
Clarence Tracy ◽  
Dieter Schroder ◽  
Stanislau Herasimenka ◽  
William Dauksher ◽  
...  
Keyword(s):  
Solar Cells ◽  
Silicon Nitride ◽  
Surface Passivation ◽  
Silicon Solar Cells ◽  
Silicon Nitride Films ◽  
Charge States

Surface passivation by silicon nitride in Laser Grooved Buried Contact (LGBC) silicon solar cells

2009 ◽  
Vol 45 (4-5) ◽  
pp. 234-239 ◽  
Author(s):  
G. Claudio ◽  
K. Bass ◽  
K. Heasman ◽  
A. Cole ◽  
S. Roberts ◽  
...  
Keyword(s):  
Solar Cells ◽  
Silicon Nitride ◽  
Surface Passivation ◽  
Silicon Solar Cells
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