A study on the fabrication of rounded patterns by spin coating of photoresist on silicon substrate with microstructures

2011 ◽  
Vol 52 (3) ◽  
pp. 499-506 ◽  
Author(s):  
Jae Sung Yoon ◽  
Yeong-Eun Yoo ◽  
Doo-Sun Choi
Keyword(s):  
Silicon Substrate ◽  
Spin Coating

scholarly journals Binary Self-Assembly of Nanocolloidal Arrays using Concurrent and Sequential Spin Coating Techniques

Materials ◽  
2021 ◽  
Vol 14 (2) ◽  
pp. 274
Author(s):  
Shih-Jyun Shen ◽  
Demei Lee ◽  
Yu-Chen Wu ◽  
Shih-Jung Liu
Keyword(s):  
Silicon Substrate ◽  
Self Assembly ◽  
Spin Coating ◽  
Processing Parameters ◽  
The Self ◽  
Silicon Substrates ◽  
Processing Conditions ◽  
Polystyrene Spheres ◽  
Optimal Processing ◽  
Spin Coater

This paper reports the binary colloid assembly of nanospheres using spin coating techniques. Polystyrene spheres with sizes of 900 and 100 nm were assembled on top of silicon substrates utilizing a spin coater. Two different spin coating processes, namely concurrent and sequential coatings, were employed. For the concurrent spin coating, 900 and 100 nm colloidal nanospheres of latex were first mixed and then simultaneously spin coated onto the silicon substrate. On the other hand, the sequential coating process first created a monolayer of a 900 nm nanosphere array on the silicon substrate, followed by the spin coating of another layer of a 100 nm colloidal array on top of the 900 nm array. The influence of the processing parameters, including the type of surfactant, spin speed, and spin time, on the self-assembly of the binary colloidal array were explored. The empirical outcomes show that by employing the optimal processing conditions, binary colloidal arrays can be achieved by both the concurrent and sequential spin coating processes.

scholarly journals Application of Ba0.5Sr0.5TiO3 (Bst) Film Doped with 0%, 2%, 4% and 6% Concentrations of RuO2 as an Arduino Nano-Based Bad Breath Sensor

Chemosensors ◽  
2019 ◽  
Vol 8 (1) ◽  
pp. 3
Author(s):  
Irzaman ◽  
Ridwan Siskandar ◽  
Brian Yuliarto ◽  
Mochammad Zakki Fahmi ◽  
Ferdiansjah
Keyword(s):  
Silicon Substrate ◽  
Spin Coating ◽  
Chemical Solution Deposition ◽  
Voltage Response ◽  
Chemical Solution ◽  
Solution Deposition ◽  
Op Amp ◽  
Electronic Circuitry ◽  
Voltage Output ◽  
Bad Breath

Ba0.5Sr0.5TiO3 (BST) film doped with variations in RuO2 concentration (0%, 2%, 4%, and 6%) has been successfully grown on a type-p silicon substrate (100) using the chemical solution deposition (CSD) method and spin-coating at a speed of 3000 rpm for 30 s. The film on the substrate was then heated at 850 °C for 15 h. The sensitivity of BST film + RuO2 variations as a gas sensor were characterized. The sensitivity characterization was assisted by various electronic circuitry with the purpose of producing a sensor that is very sensitive to gas. The responses from the BST film + RuO2 variation were varied, depending on the concentration of the RuO2 dope. BST film doped with 6% RuO2 had a very good response to halitosis gases; therefore, this film was applied as the Arduino-Nano-based bad-breath detecting sensor. Before it was integrated with the microcontroller, the voltage output of the BST film was amplified using an op-amp circuit to make the voltage output from the BST film readable to the microcontroller. The changes in the voltage response were then shown on the prototype display. If the voltage output was ≤12.9 mV, the display would read “bad breath”. If the voltage output >42.1 mV, the display would read “fragrant”. If 12.9 mV < voltage output ≤ 42.1 mV, the display would read “normal”.

Metastable Pyrochlore Structures in Sol Gel Spin Coated Lead Titanate Thin Films on Silicon Substrate

1991 ◽  
Vol 230 ◽  
Author(s):  
Jeon-Kook Lee ◽  
Hyung-Jin Jung ◽  
Chong-Hee Kim
Keyword(s):  
Thin Films ◽  
Silicon Substrate ◽  
Spin Coating ◽  
Lead Titanate ◽  
Random Network ◽  
Sol Gel ◽  
Pyrochlore Structure ◽  
Native Oxide ◽  
Silicon Substrates ◽  
Heat Treated

AbstractHigh quality lead titanate thin films were fabricated by spin coating on a silicon substrate. The resulting dried gel layers were uniform in thickness through 2 ' area, and polycrystalline perovskite structures developed almost crack free with a heat treatment above 500°C in films with thickness above 0.36μm.Metastable pyrochlore structures were observed in films with thickness of 0.16,μm when heat treated at 500 and 600 °C. But these structure did not appear in films with thickness of 0.36μm.The thickness dependencein crystal structure of films was studied by varing the substrate condition and analyzing the interface between the.film and. substrate. In native oxide films on silicon substrates, amorphous dried gel layers were heterogeneously nucleated. Metastable cubic pyrochlore structure could be crystallized in amorphous native oxide (cubic property in random network structure).

Research of Preparation and Etching of PS Microspheres Film

2012 ◽  
Vol 602-604 ◽  
pp. 1470-1473
Author(s):  
Dong Sheng Peng ◽  
Zhi Gang Chen ◽  
Cong Cong Tan
Keyword(s):  
Silicon Substrate ◽  
Spin Coating ◽  
Technological Parameter ◽  
Process Parameter ◽  
Etching Time ◽  
Monolayer Film ◽  
Etching Effect

In this article, the polystyrene (PS) microspheres monolayer film was manufactured on silicon substrate by spin-coating, and the effect of PS microspheres concentration on preparation of monolayer film was discussed in detail. With a view to the application of graphic substrate technology, the etching effect with different technological parameter (etching time and power) was researched, and a set of appropriate process parameter were obtained, which met the requirements of preparation of the extension graphics silicon substrate.

Gas Sensing Properties of Indium Oxide Thin Film on Silicon Substrate Prepared by Spin-Coating Method

1998 ◽  
Vol 37 (Part 1, No. 9A) ◽  
pp. 4994-4998 ◽  
Author(s):  
Wan-Young Chung ◽  
Go Sakai ◽  
Kengo Shimanoe ◽  
Norio Miura ◽  
Duk-Dong Lee ◽  
...  
Keyword(s):  
Thin Film ◽  
Indium Oxide ◽  
Silicon Substrate ◽  
Spin Coating ◽  
Gas Sensing ◽  
Oxide Thin Film ◽  
Sensing Properties ◽  
Gas Sensing Properties ◽  
Coating Method ◽  
Indium Oxide Thin Film

Precise control of the size and gap between gold nanocubes by surface-based synthesis for high SERS performance

Soft Matter ◽  
2020 ◽  
Vol 16 (7) ◽  
pp. 1857-1865 ◽  
Author(s):  
Rana Omar ◽  
Aotmane En Naciri ◽  
Abeer Fahes ◽  
Safi Jradi ◽  
Ali Issa ◽  
...  
Keyword(s):  
Optical Properties ◽  
Spectroscopic Ellipsometry ◽  
Silicon Substrate ◽  
Spin Coating ◽  
Precise Control ◽  
Gold Precursor

Gold nanocubes with tunable size and interparticle gap were produced by altering the spin-coating speed of PMMA/gold precursor dispersion on silicon substrate. Then, their optical properties were provided by spectroscopic ellipsometry measurements.

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