High‐Fidelity, Sub‐5 nm Patterns from High‐χ Block Copolymer Films with Vapor‐Deposited Ultrathin, Cross‐Linked Surface‐Modification Layers
2020 ◽
Vol 41
(4)
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pp. 1900514
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2011 ◽
Vol 21
(10)
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pp. 2941-2944
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2003 ◽
Vol 107
(26)
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pp. 6377-6383
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