Bio-based multilayer barrier films by extrusion, dispersion coating and atomic layer deposition

2015 ◽  
Vol 133 (2) ◽  
pp. n/a-n/a ◽  
Author(s):  
Jari Vartiainen ◽  
Yingfeng Shen ◽  
Timo Kaljunen ◽  
Tero Malm ◽  
Mika Vähä-Nissi ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Barrier Films ◽  
Layer Deposition ◽  
Multilayer Barrier

Highly-impermeable Al2O3/HfO2 moisture barrier films grown by low-temperature plasma-enhanced atomic layer deposition

2017 ◽  
Vol 50 ◽  
pp. 296-303 ◽  
Author(s):  
Lae Ho Kim ◽  
Jin Hyuk Jang ◽  
Yong Jin Jeong ◽  
Kyunghun Kim ◽  
Yonghwa Baek ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Low Temperature Plasma ◽  
Temperature Plasma ◽  
Moisture Barrier ◽  
Barrier Films ◽  
Layer Deposition

Atomic Layer Deposition of W[sub 1.5]N Barrier Films for Cu Metallization

2005 ◽  
Vol 152 (7) ◽  
pp. G522 ◽  
Author(s):  
S. Bystrova ◽  
A. A. I. Aarnink ◽  
J. Holleman ◽  
R. A. M. Wolters
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Barrier Films ◽  
Cu Metallization ◽  
Layer Deposition

Low-temperature gas-barrier films by atomic layer deposition for encapsulating organic light-emitting diodes

2016 ◽  
Vol 27 (29) ◽  
pp. 295706 ◽  
Author(s):  
Ming-Hung Tseng ◽  
Hui-Huan Yu ◽  
Kun-Yi Chou ◽  
Jwo-Huei Jou ◽  
Kung-Liang Lin ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Light Emitting Diodes ◽  
Atomic Layer ◽  
Organic Light Emitting Diodes ◽  
Gas Barrier ◽  
Light Emitting ◽  
Barrier Films ◽  
Organic Light ◽  
Layer Deposition
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