Structure and Mechanical Properties of Magnesium-Titanium Solid Solution Thin Film Alloys Prepared by Magnetron-sputter Deposition

2011 ◽  
pp. 617-621
Author(s):  
Daad Haddad ◽  
GuangLing Song ◽  
Yang Tse Cheng
Keyword(s):  
Thin Film ◽  
Mechanical Properties ◽  
Solid Solution ◽  
Sputter Deposition ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter

Structure and Mechanical Properties of Titanium Nitride, Zirconium Nitride, and Chromium Nitride Films by Reactive Magnetron-Sputter Deposition

1996 ◽  
Vol 458 ◽  
Author(s):  
W.-H. Soe ◽  
T. Kitagaki ◽  
H. Ueda ◽  
N. Shima ◽  
M. Otsuka ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Sputter Deposition ◽  
Zirconium Nitride ◽  
Chromium Nitride ◽  
Reactive Magnetron ◽  
Nano Indentation ◽  
Low Load ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter ◽  
Hardness Values

ABSTRACTTiN, ZrN, and CrN films were grown by reactive magnetron sputtering on WC-Co sintered hard alloy substrates. Hardness and elastic modulus were measured by nano-indentation tester with low load on tip at 200 mgf. Hardness values were shown the higher value the thinner film thickness due to stress in the films.

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