CNx films were deposited on YG8 carbide alloy (WC+8%Co) substrates by DC or RF magnetron sputtering. The composition, bonding state, adhesion, and tribological behavior of CNx films were researched. X-ray Photoelectron spectroscopy results showed that C-N, C=N and C≡N bond existed in CNx films. RF magnetron sputtering is in favor of the bonding of C and N, the adhesion and the wear resistance of CNx films. DC magnetron sputtering is in favor of lubricating ability of CNx films. Substrate bias has some effect on the bonding of C and N, the adhesion of the films, decrease of adhesive wear and the friction coefficient of films.
The nano-indentation response and the friction and wear properties of the CNx/SiC (carbon nitride /silicon carbon) double layer thin films (SiC films as interlayer) deposited on nanocrystalline titanium substrate using magnetron sputtering technique at room temperature were investigated. The results show that the CNx films exhibited a low nano-hardness of 8.0 GPa and Young's modulus of 55.0 GPa but a high hardness-to-modulus ratio of 0.146. As sliding against Si3N4 (silicon nitride) ball under Kokubo simulation body fluid (SBF) at room temperature, the CNx films exhibited the superior tribological properties with the friction coefficients of about 0.1 and the special wear rate of about 1.6×10−6 mm3/Nm.
The interface adhesion, nano-indentation and friction/wear properties of the CNx films in CNx/SiC (carbon nitride/silicon carbon) double layer films (SiC as interlayer) deposited on Mg alloy (AZ91D) substrate by using magnetron sputtering technique at room temperature were investigated. The results show that the interface between CNx film and SiC film and the interface between SiC film and Mg substrate both showed obvious and gradual element diffusions as well as high adhesion. The CNx films exhibited low nano-hardness (3.85 GPa) and Young's modulus (30.46 GPa) but high hardness-to-modulus ratio (0.126). As sliding against Si3N4 (silicon nitride) ball (4 mm in diameter) using ball-on-disc friction and wear tester under dry sliding condition at 200g load, the CNx films exhibited the friction coefficient of about 0.20 and the special wear rate in the order of magnitude of 10−6 mm3 m−1 N−1 without film cracking and interface delaminating.
Applications insight into the plasmochemical state and optical properties of amorphous CNx films deposited by gas injection magnetron sputtering method