Magnetron-sputter deposition of high-indium-content n-AlInN thin film on p-Si(001) substrate for photovoltaic applications

H. F. Liu; C. C. Tan; G. K. Dalapati; D. Z. Chi

doi:10.1063/1.4754319

Magnetron-sputter deposition of high-indium-content n-AlInN thin film on p-Si(001) substrate for photovoltaic applications

Journal of Applied Physics ◽

10.1063/1.4754319 ◽

2012 ◽

Vol 112 (6) ◽

pp. 063114 ◽

Cited By ~ 18

Author(s):

H. F. Liu ◽

C. C. Tan ◽

G. K. Dalapati ◽

D. Z. Chi

Keyword(s):

Thin Film ◽

Indium Content ◽

Sputter Deposition ◽

Photovoltaic Applications ◽

Magnetron Sputter Deposition ◽

High Indium Content ◽

Magnetron Sputter

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A two magnetron sputter deposition chamber for in situ observation of thin film growth by synchrotron radiation scattering

Review of Scientific Instruments ◽

10.1063/1.1384432 ◽

2001 ◽

Vol 72 (8) ◽

pp. 3344-3348 ◽

Cited By ~ 39

Author(s):

W. Matz ◽

N. Schell ◽

W. Neumann ◽

J. Bøttiger ◽

J. Chevallier

Keyword(s):

Thin Film ◽

Film Growth ◽

Sputter Deposition ◽

Thin Film Growth ◽

In Situ Observation ◽

Radiation Scattering ◽

Deposition Chamber ◽

Magnetron Sputter Deposition ◽

Magnetron Sputter

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Reactive close field unbalance magnetron sputter deposition of titanium dioxides for potential photovoltaic applications

Surface Engineering ◽

10.1080/02670844.2016.1179022 ◽

2016 ◽

Vol 33 (8) ◽

pp. 642-647 ◽

Cited By ~ 1

Author(s):

Z. Zhang ◽

G. Shao

Keyword(s):

Sputter Deposition ◽

Photovoltaic Applications ◽

Magnetron Sputter Deposition ◽

Magnetron Sputter ◽

Titanium Dioxides

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Characterization and Performance of LiFePO[sub 4] Thin-Film Cathodes Prepared with Radio-Frequency Magnetron-Sputter Deposition

Journal of The Electrochemical Society ◽

10.1149/1.2746804 ◽

2007 ◽

Vol 154 (8) ◽

pp. A805 ◽

Cited By ~ 46

Author(s):

Jian Hong ◽

Chunsheng Wang ◽

Nancy J. Dudney ◽

Michael J. Lance

Keyword(s):

Thin Film ◽

Radio Frequency ◽

Sputter Deposition ◽

Radio Frequency Magnetron ◽

Magnetron Sputter Deposition ◽

Magnetron Sputter ◽

And Performance

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A Two Magnetron Sputter Deposition Chamber Equipped with an Additional Ion Gun for in situ Observation of Thin Film Growth and Surface Modification by Synchrotron Radiation Scattering

10.1063/1.2436422 ◽

2007 ◽

Cited By ~ 7

Author(s):

Norbert Schell ◽

Johannes von Borany ◽

Jens Hauser

Keyword(s):

Thin Film ◽

Film Growth ◽

Sputter Deposition ◽

Thin Film Growth ◽

In Situ Observation ◽

Radiation Scattering ◽

Deposition Chamber ◽

Magnetron Sputter Deposition ◽

Magnetron Sputter

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In situ measurement of the surface stress evolution during magnetron sputter-deposition of Ag thin film

Applied Surface Science ◽

10.1016/j.apsusc.2007.05.033 ◽

2007 ◽

Vol 253 (23) ◽

pp. 9112-9115 ◽

Cited By ~ 6

Author(s):

Seung Hyun Lee ◽

Joong Keun Park

Keyword(s):

Thin Film ◽

Surface Stress ◽

Sputter Deposition ◽

In Situ Measurement ◽

Stress Evolution ◽

Magnetron Sputter Deposition ◽

Magnetron Sputter

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Magnetron-sputter deposition of Fe3S4 thin films and their conversion into pyrite (FeS2) by thermal sulfurization for photovoltaic applications

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.3699022 ◽

2012 ◽

Vol 30 (4) ◽

pp. 04D102 ◽

Cited By ~ 20

Author(s):

Hongfei Liu ◽

Dongzhi Chi

Keyword(s):

Thin Films ◽

Sputter Deposition ◽

Photovoltaic Applications ◽

Magnetron Sputter Deposition ◽

Magnetron Sputter

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Microstructured Nickel-Titanium Thin Film Leaflets for Hybrid Tissue Engineered Heart Valves Fabricated by Magnetron Sputter Deposition

Cardiovascular Engineering and Technology ◽

10.1007/s13239-015-0254-6 ◽

2016 ◽

Vol 7 (1) ◽

pp. 69-77 ◽

Cited By ~ 7

Author(s):

K. Loger ◽

A. Engel ◽

J. Haupt ◽

R. Lima de Miranda ◽

G. Lutter ◽

...

Keyword(s):

Thin Film ◽

Heart Valves ◽

Sputter Deposition ◽

Nickel Titanium ◽

Titanium Thin Film ◽

Magnetron Sputter Deposition ◽

Magnetron Sputter ◽

Tissue Engineered Heart Valves

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Structure and Mechanical Properties of Magnesium-Titanium Solid Solution Thin Film Alloys Prepared by Magnetron-sputter Deposition

Magnesium Technology 2011 ◽

10.1002/9781118062029.ch113 ◽

2011 ◽

pp. 617-621

Author(s):

Daad Haddad ◽

GuangLing Song ◽

Yang Tse Cheng

Keyword(s):

Thin Film ◽

Mechanical Properties ◽

Solid Solution ◽

Sputter Deposition ◽

Magnetron Sputter Deposition ◽

Magnetron Sputter

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Structure and Mechanical Properties of Magnesium-Titanium Solid Solution Thin Film Alloys Prepared by Magnetron-sputter Deposition

Magnesium Technology 2011 ◽

10.1007/978-3-319-48223-1_113 ◽

2011 ◽

pp. 617-621

Author(s):

Daad Haddad ◽

GuangLing Song ◽

Yang Tse Cheng

Keyword(s):

Thin Film ◽

Mechanical Properties ◽

Solid Solution ◽

Sputter Deposition ◽

Magnetron Sputter Deposition ◽

Magnetron Sputter

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Microstructural evolution and Poisson ratio of epitaxial ScN grown on TiN(001)/MgO(001) by ultrahigh vacuum reactive magnetron sputter deposition

Journal of Applied Physics ◽

10.1063/1.371555 ◽

1999 ◽

Vol 86 (10) ◽

pp. 5524-5529 ◽

Cited By ~ 59

Author(s):

D. Gall ◽

I. Petrov ◽

P. Desjardins ◽

J. E. Greene

Keyword(s):

Microstructural Evolution ◽

Poisson Ratio ◽

Ultrahigh Vacuum ◽

Sputter Deposition ◽

Reactive Magnetron ◽

Magnetron Sputter Deposition ◽

Magnetron Sputter

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