2008 16th IEEE International Conference on Advanced Thermal Processing of Semiconductors
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9781424419500, 9781424419517
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Laser annealing of double implanted layers for IGBT Power Devices

2008 ◽  
Author(s):  
Clement Sabatier ◽  
Simon Rack ◽  
Herve Beseaucele ◽  
Julien Venturini ◽  
Thomas Y. Hoffmann ◽  
...  
Keyword(s):  
Laser Annealing ◽  
Power Devices

Thermal and non-thermal kinetics of defects and dopant in Si

2008 ◽  
Author(s):  
A. La Magna ◽  
G. Fisicaro ◽  
G. Mannino ◽  
V. Privitera ◽  
G. Piccitto ◽  
...  
Keyword(s):  
Thermal Kinetics ◽  
Kinetics Of

Si surface preparation and passivation by vapor phase of heavy water

2008 ◽  
Author(s):  
Andrea Edit Pap ◽  
Peter Petrik ◽  
Bela Pecz ◽  
Gabor Battistig ◽  
Istvan Barsony ◽  
...  
Keyword(s):  
Vapor Phase ◽  
Heavy Water ◽  
Surface Preparation
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