2007 IEEE International Conference on Microelectronic Test Structures
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Analog characterization of dielectric relaxation of MIM capacitor using an improved recovery voltage technique

2007 IEEE International Conference on Microelectronic Test Structures ◽

10.1109/icmts.2007.374465 ◽

2007 ◽

Author(s):

Zhenqiu Ning ◽

Herman Casier ◽

Renaud Gillon ◽

H-X Delecourt ◽

Dimitri Tack ◽

...

Keyword(s):

Dielectric Relaxation ◽

Recovery Voltage

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A New Test Structure for Shallow Trench Isolation (STI) Depth Monitor

2007 IEEE International Conference on Microelectronic Test Structures ◽

10.1109/icmts.2007.374449 ◽

2007 ◽

Cited By ~ 1

Author(s):

Qingfeng Wang ◽

Sameer Pendharkar ◽

Binghua Hu ◽

Bill Russell ◽

Pam Jones-Williams

Keyword(s):

Test Structure ◽

Shallow Trench Isolation ◽

Trench Isolation

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Evaluation of 300 mm High Resistivity SOI UNIBOND material for RF applications up to millimeter wave using 65 nm CMOS SOI technology

2007 IEEE International Conference on Microelectronic Test Structures ◽

10.1109/icmts.2007.374485 ◽

2007 ◽

Author(s):

F. Gianesello ◽

C. Raynaud ◽

D. Gloria ◽

S. Boret ◽

B. Ghyselen ◽

...

Keyword(s):

Millimeter Wave ◽

High Resistivity ◽

Rf Applications ◽

Soi Technology

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Modeling the Mismatch of High-k MIM Capacitors

2007 IEEE International Conference on Microelectronic Test Structures ◽

10.1109/icmts.2007.374466 ◽

2007 ◽

Cited By ~ 2

Author(s):

M. Marin ◽

S. Cremer ◽

J.-C. Giraudin ◽

B. Martinet

Keyword(s):

High K ◽

Mim Capacitors

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A Test Structure for Analysis of Asymmetry and Orientation Dependence of MOSFETs

2007 IEEE International Conference on Microelectronic Test Structures ◽

10.1109/icmts.2007.374473 ◽

2007 ◽

Cited By ~ 1

Author(s):

T. Matsuda ◽

Y. Sugiyama ◽

K. Nohara ◽

K. Morita ◽

H. Iwata ◽

...

Keyword(s):

Orientation Dependence ◽

Test Structure

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Extraction of Sheet Resistance and Linewidth from All-Copper ECD Test Structures Fabricated from Silicon Preforms

2007 IEEE International Conference on Microelectronic Test Structures ◽

10.1109/icmts.2007.374447 ◽

2007 ◽

Cited By ~ 1

Author(s):

B.J.R. Shulver ◽

A.S. Bunting ◽

A.M. Gundlach ◽

L.I. Haworth ◽

A.W.S. Ross ◽

...

Keyword(s):

Sheet Resistance

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Array Based Test Structure for Optical-Electrical Overlay Calibration

2007 IEEE International Conference on Microelectronic Test Structures ◽

10.1109/icmts.2007.374476 ◽

2007 ◽

Author(s):

B.J.R. Shulver ◽

R.A. Allen ◽

A.J. Walton ◽

M.W. Cresswell ◽

J.T.M. Stevenson ◽

...

Keyword(s):

Test Structure

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Impact of Sinter Process and Metal Coverage on Transistor Mismatching and Parameter Variations in Analog CMOS Technology

2007 IEEE International Conference on Microelectronic Test Structures ◽

10.1109/icmts.2007.374457 ◽

2007 ◽

Cited By ~ 3

Author(s):

Xiaoju Wu ◽

Joe Trogolo ◽

Flex Inoue ◽

Zhenwu Chen ◽

Pam Jones-Williams ◽

...

Keyword(s):

Sinter Process ◽

Cmos Technology ◽

Analog Cmos ◽

Parameter Variations

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Quantitative analysis of Joule heating in surface micromachined Greek cross test structures

2007 IEEE International Conference on Microelectronic Test Structures ◽

10.1109/icmts.2007.374487 ◽

2007 ◽

Author(s):

S. Enderling ◽

S. Smith ◽

J.T.M. Stevenson ◽

A.J. Walton

Keyword(s):

Quantitative Analysis ◽

Joule Heating ◽

Cross Test

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Understanding the Carbon Impact on Si/SiGe:C HBT Base Current Mismatch

2007 IEEE International Conference on Microelectronic Test Structures ◽

10.1109/icmts.2007.374460 ◽

2007 ◽

Cited By ~ 1

Author(s):

Stephane Danaie ◽

Mathieu Marin ◽

Gerard Ghibaudo ◽

Jean-Charles Vildeuil ◽

Stephanie Chouteau ◽

...

Keyword(s):

Base Current

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2007 IEEE International Conference on Microelectronic Test StructuresLatest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

Analog characterization of dielectric relaxation of MIM capacitor using an improved recovery voltage technique

A New Test Structure for Shallow Trench Isolation (STI) Depth Monitor

Evaluation of 300 mm High Resistivity SOI UNIBOND material for RF applications up to millimeter wave using 65 nm CMOS SOI technology

Modeling the Mismatch of High-k MIM Capacitors

A Test Structure for Analysis of Asymmetry and Orientation Dependence of MOSFETs

Extraction of Sheet Resistance and Linewidth from All-Copper ECD Test Structures Fabricated from Silicon Preforms

Array Based Test Structure for Optical-Electrical Overlay Calibration

Impact of Sinter Process and Metal Coverage on Transistor Mismatching and Parameter Variations in Analog CMOS Technology

Quantitative analysis of Joule heating in surface micromachined Greek cross test structures

Understanding the Carbon Impact on Si/SiGe:C HBT Base Current Mismatch

2007 IEEE International Conference on Microelectronic Test Structures
Latest Publications