Proceedings of the 1991 International Conference on Microelectronic Test Structures
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Fully-automated line-width measurement system and its applications

Proceedings of the 1991 International Conference on Microelectronic Test Structures ◽

10.1109/icmts.1990.161727 ◽

2002 ◽

Cited By ~ 1

Author(s):

M. Yoshizawa ◽

K. Wada

Keyword(s):

Line Width ◽

Measurement System ◽

Width Measurement ◽

Automated Line

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A modified sliding wire potentiometer test structure for mapping nanometer-level distances

Proceedings of the 1991 International Conference on Microelectronic Test Structures ◽

10.1109/icmts.1990.161726 ◽

2002 ◽

Cited By ~ 14

Author(s):

M.W. Cresswell ◽

M. Gaitan ◽

R.A. Allen ◽

L.W. Linholm

Keyword(s):

Test Structure

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Novel measurement technique for trapped charge centroid in gate insulator (of DRAM)

Proceedings of the 1991 International Conference on Microelectronic Test Structures ◽

10.1109/icmts.1990.161718 ◽

2002 ◽

Cited By ~ 1

Author(s):

J. Kumagai ◽

S. Sawada ◽

K. Toita

Keyword(s):

Measurement Technique ◽

Gate Insulator ◽

Trapped Charge

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Analysis of process-induced charges created in MOSFETs and related collection test structures

Proceedings of the 1991 International Conference on Microelectronic Test Structures ◽

10.1109/icmts.1990.161712 ◽

2002 ◽

Cited By ~ 2

Author(s):

P. Dars ◽

R. Basset ◽

G. Merckel

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MOSFET statistical parameter extraction using multivariate statistics

Proceedings of the 1991 International Conference on Microelectronic Test Structures ◽

10.1109/icmts.1990.161743 ◽

2002 ◽

Cited By ~ 18

Author(s):

J.A. Power ◽

A. Mathewson ◽

W.A. Lane

Keyword(s):

Multivariate Statistics ◽

Statistical Parameter ◽

Parameter Extraction ◽

Statistical Parameter Extraction

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Test SRAMs for characterizing alpha particle tracks in CMOS/bulk memories

Proceedings of the 1991 International Conference on Microelectronic Test Structures ◽

10.1109/icmts.1990.161723 ◽

2002 ◽

Cited By ~ 5

Author(s):

M.G. Buehler ◽

B.R. Blaes ◽

G.A. Soli

Keyword(s):

Alpha Particle ◽

Particle Tracks

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Gate oxide thickness measurement using Fowler-Nordheim tunneling

Proceedings of the 1991 International Conference on Microelectronic Test Structures ◽

10.1109/icmts.1990.161713 ◽

2002 ◽

Cited By ~ 9

Author(s):

R.A. Ashton

Keyword(s):

Gate Oxide ◽

Oxide Thickness ◽

Thickness Measurement ◽

Gate Oxide Thickness ◽

Nordheim Tunneling

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A new effective channel length determination method for LDD MOSFETs

Proceedings of the 1991 International Conference on Microelectronic Test Structures ◽

10.1109/icmts.1990.161744 ◽

2002 ◽

Cited By ~ 11

Author(s):

K. Takeuchi ◽

N. Kasai ◽

K. Terada

Keyword(s):

Channel Length ◽

Determination Method ◽

Length Determination ◽

Effective Channel

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A hot carrier parallel testing technique to give a reliable extrapolation

Proceedings of the 1991 International Conference on Microelectronic Test Structures ◽

10.1109/icmts.1990.161749 ◽

2002 ◽

Author(s):

N. Koike ◽

M. Ito ◽

H. Kuriyama

Keyword(s):

Testing Technique ◽

Hot Carrier ◽

Parallel Testing

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Measurement of lateral diffusion on technologies with polysilicon doping source with misalignment correction

Proceedings of the 1991 International Conference on Microelectronic Test Structures ◽

10.1109/icmts.1990.161735 ◽

2002 ◽

Cited By ~ 1

Author(s):

J. Anguita ◽

C. Perello ◽

M. Lozano ◽

C. Cane ◽

E. Lora-Tamayo

Keyword(s):

Lateral Diffusion

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Proceedings of the 1991 International Conference on Microelectronic Test StructuresLatest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

Fully-automated line-width measurement system and its applications

A modified sliding wire potentiometer test structure for mapping nanometer-level distances

Novel measurement technique for trapped charge centroid in gate insulator (of DRAM)

Analysis of process-induced charges created in MOSFETs and related collection test structures

MOSFET statistical parameter extraction using multivariate statistics

Test SRAMs for characterizing alpha particle tracks in CMOS/bulk memories

Gate oxide thickness measurement using Fowler-Nordheim tunneling

A new effective channel length determination method for LDD MOSFETs

A hot carrier parallel testing technique to give a reliable extrapolation

Measurement of lateral diffusion on technologies with polysilicon doping source with misalignment correction

Proceedings of the 1991 International Conference on Microelectronic Test Structures
Latest Publications