Topics in Current Chemistry - Plasma Chemistry III
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Elementary processes at solid surfaces immersed in low pressure plasmas

Topics in Current Chemistry - Plasma Chemistry III ◽

10.1007/bfb0048587 ◽

2006 ◽

pp. 69-125 ◽

Cited By ~ 21

Author(s):

Harold F. Winters

Keyword(s):

Low Pressure ◽

Solid Surfaces ◽

Elementary Processes

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Plasma chemistry of fluorocarbons as related to plasma etching and plasma polymerization

Topics in Current Chemistry - Plasma Chemistry III ◽

10.1007/bfb0048585 ◽

2006 ◽

pp. 1-42 ◽

Cited By ~ 36

Author(s):

Eric Kay ◽

John Coburn ◽

Alan Dilks

Keyword(s):

Plasma Etching ◽

Plasma Polymerization ◽

Plasma Chemistry

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The Mechanism and kinetics of plasma polymerization

Topics in Current Chemistry - Plasma Chemistry III ◽

10.1007/bfb0048586 ◽

2006 ◽

pp. 43-68 ◽

Cited By ~ 24

Author(s):

Alexis T. Bell

Keyword(s):

Plasma Polymerization ◽

Mechanism And Kinetics ◽

Kinetics Of

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