High Dielectric Constant Materials - Springer Series in Advanced Microelectronics
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Published By Springer Berlin Heidelberg

9783540210818, 9783540264620

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Brief Notes on the History of Gate Dielectrics in MOS Devices

High Dielectric Constant Materials - Springer Series in Advanced Microelectronics ◽

10.1007/3-540-26462-0_2 ◽

2005 ◽

pp. 33-44 ◽

Cited By ~ 1

Author(s):

E. Kooi† ◽

A. Schmitz

Keyword(s):

Gate Dielectrics ◽

Mos Devices ◽

History Of

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Designing Interface Composition and Structure in High Dielectric Constant Gate Stacks

High Dielectric Constant Materials - Springer Series in Advanced Microelectronics ◽

10.1007/3-540-26462-0_10 ◽

2005 ◽

pp. 287-310

Author(s):

G.N. Parsons

Keyword(s):

Dielectric Constant ◽

High Dielectric Constant ◽

Gate Stacks ◽

Interface Composition ◽

Composition And Structure ◽

High Dielectric

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Optimal Scaling Methodologies and Transistor Performance

High Dielectric Constant Materials - Springer Series in Advanced Microelectronics ◽

10.1007/3-540-26462-0_6 ◽

2005 ◽

pp. 143-194 ◽

Cited By ~ 6

Author(s):

T. Skotnicki ◽

F. Boeuf

Keyword(s):

Optimal Scaling

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High-k Crystalline Gate Dielectrics: An IC Manufacturer's Perspective

High Dielectric Constant Materials - Springer Series in Advanced Microelectronics ◽

10.1007/3-540-26462-0_20 ◽

2005 ◽

pp. 639-666 ◽

Cited By ~ 2

Author(s):

R. Droopad ◽

K. Eisenbeiser ◽

A.A. Demkov

Keyword(s):

Gate Dielectrics ◽

High K

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Silicon Oxynitride Gate Dielectric for Reducing Gate Leakage and Boron Penetration Prior to High-k Gate Dielectric Implementation

High Dielectric Constant Materials - Springer Series in Advanced Microelectronics ◽

10.1007/3-540-26462-0_7 ◽

2005 ◽

pp. 195-220 ◽

Cited By ~ 1

Author(s):

H.-H. Tseng

Keyword(s):

Gate Dielectric ◽

Silicon Oxynitride ◽

Gate Leakage ◽

High K ◽

Boron Penetration ◽

High K Gate Dielectric

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Advanced MOS-Devices

High Dielectric Constant Materials - Springer Series in Advanced Microelectronics ◽

10.1007/3-540-26462-0_21 ◽

2005 ◽

pp. 667-705

Author(s):

J. Bokor ◽

T.-J. King ◽

J. Hergenrother ◽

J. Bude ◽

D. Muller ◽

...

Keyword(s):

Mos Devices

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Issues in Metal Gate Electrode Selection for Bulk CMOS Devices

High Dielectric Constant Materials - Springer Series in Advanced Microelectronics ◽

10.1007/3-540-26462-0_14 ◽

2005 ◽

pp. 415-434 ◽

Cited By ~ 5

Author(s):

V. Misra

Keyword(s):

Gate Electrode ◽

Metal Gate ◽

Selection For ◽

Electrode Selection

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CMOS IC Fabrication Issues for High-k Gate Dielectric and Alternate Electrode Materials

High Dielectric Constant Materials - Springer Series in Advanced Microelectronics ◽

10.1007/3-540-26462-0_15 ◽

2005 ◽

pp. 435-481 ◽

Cited By ~ 1

Author(s):

L. Colombo ◽

A.L.P. Rotondaro ◽

M.R. Visokay ◽

J.J. Chambers

Keyword(s):

Electrode Materials ◽

Gate Dielectric ◽

High K ◽

Cmos Ic ◽

High K Gate Dielectric

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Characterization and Metrology of Medium Dielectric Constant Gate Dielectric Films

High Dielectric Constant Materials - Springer Series in Advanced Microelectronics ◽

10.1007/3-540-26462-0_16 ◽

2005 ◽

pp. 483-520

Author(s):

A.C. Diebold ◽

W.W. Chism

Keyword(s):

Dielectric Constant ◽

Gate Dielectric ◽

Dielectric Films

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High Dielectric Constant Materials - Springer Series in Advanced MicroelectronicsLatest Publications

TOTAL DOCUMENTS

H-INDEX

Published By Springer Berlin Heidelberg

Brief Notes on the History of Gate Dielectrics in MOS Devices

Designing Interface Composition and Structure in High Dielectric Constant Gate Stacks

Optimal Scaling Methodologies and Transistor Performance

High-k Crystalline Gate Dielectrics: An IC Manufacturer's Perspective

Silicon Oxynitride Gate Dielectric for Reducing Gate Leakage and Boron Penetration Prior to High-k Gate Dielectric Implementation

Advanced MOS-Devices

Issues in Metal Gate Electrode Selection for Bulk CMOS Devices

CMOS IC Fabrication Issues for High-k Gate Dielectric and Alternate Electrode Materials

Characterization and Metrology of Medium Dielectric Constant Gate Dielectric Films

High Dielectric Constant Materials - Springer Series in Advanced Microelectronics
Latest Publications