Micromechanics and MEMS
Latest Publications

TOTAL DOCUMENTS

19

(FIVE YEARS 0)

H-INDEX

0

(FIVE YEARS 0)

Published By IEEE

9780470545263, 0470545267

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Section 5: Magnetic Actuators

Micromechanics and MEMS ◽

10.1109/9780470545263.sect5 ◽

2009 ◽

Keyword(s):

Magnetic Actuators

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About the Editor

Micromechanics and MEMS ◽

10.1109/9780470545263.bioed ◽

2009 ◽

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Section 8: Valves and Pumps

Micromechanics and MEMS ◽

10.1109/9780470545263.sect8 ◽

2009 ◽

Keyword(s):

Section 8

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Section 6: Harmonic Motors

Micromechanics and MEMS ◽

10.1109/9780470545263.sect6 ◽

2009 ◽

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Section 3: Comb Drive Actuators

Micromechanics and MEMS ◽

10.1109/9780470545263.sect3 ◽

2009 ◽

Keyword(s):

Comb Drive

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Section 7: Other Actuators

Micromechanics and MEMS ◽

10.1109/9780470545263.sect7 ◽

2009 ◽

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Section 13: ComputerAided Design

Micromechanics and MEMS ◽

10.1109/9780470545263.sect13 ◽

2009 ◽

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Section 12: LIGA

Micromechanics and MEMS ◽

10.1109/9780470545263.sect12 ◽

2009 ◽

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Section 11: Bulk Micromachining

Micromechanics and MEMS ◽

10.1109/9780470545263.sect11 ◽

2009 ◽

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Editor's Notes on the Second Printing

Micromechanics and MEMS ◽

10.1109/9780470545263.notesed ◽

2009 ◽

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