Process Variations in Microsystems Manufacturing - Microsystems and Nanosystems
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Published By Springer International Publishing

9783030405588, 9783030405601

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Microsystems Process Integration, Testing, and Packaging

Process Variations in Microsystems Manufacturing - Microsystems and Nanosystems ◽

10.1007/978-3-030-40560-1_7 ◽

2020 ◽

pp. 275-311

Author(s):

Michael Huff

Keyword(s):

Process Integration ◽

Integration Testing

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Metrology for Microsystems Manufacturing

Process Variations in Microsystems Manufacturing - Microsystems and Nanosystems ◽

10.1007/978-3-030-40560-1_5 ◽

2020 ◽

pp. 173-225

Author(s):

Michael Huff

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An Overview of MEMS Microsystems

Process Variations in Microsystems Manufacturing - Microsystems and Nanosystems ◽

10.1007/978-3-030-40560-1_2 ◽

2020 ◽

pp. 9-44

Author(s):

Michael Huff

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Managing Parameter Variations in Microsystems Device Design

Process Variations in Microsystems Manufacturing - Microsystems and Nanosystems ◽

10.1007/978-3-030-40560-1_10 ◽

2020 ◽

pp. 447-507

Author(s):

Michael Huff

Keyword(s):

Device Design ◽

Parameter Variations

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Yield Analysis and Quality Assurance and Control Methods Used in Microsystems Manufacturing

Process Variations in Microsystems Manufacturing - Microsystems and Nanosystems ◽

10.1007/978-3-030-40560-1_9 ◽

2020 ◽

pp. 389-446 ◽

Cited By ~ 1

Author(s):

Michael Huff

Keyword(s):

Quality Assurance ◽

Control Methods ◽

Yield Analysis ◽

And Control ◽

Quality Assurance And Control

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Microsystems Material Properties

Process Variations in Microsystems Manufacturing - Microsystems and Nanosystems ◽

10.1007/978-3-030-40560-1_6 ◽

2020 ◽

pp. 227-273

Author(s):

Michael Huff

Keyword(s):

Material Properties

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Microsystems Manufacturing Methods: MEMS Processes

Process Variations in Microsystems Manufacturing - Microsystems and Nanosystems ◽

10.1007/978-3-030-40560-1_4 ◽

2020 ◽

pp. 99-171

Author(s):

Michael Huff

Keyword(s):

Manufacturing Methods

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Microsystems Manufacturing Methods: Integrated Circuit Processing Steps

Process Variations in Microsystems Manufacturing - Microsystems and Nanosystems ◽

10.1007/978-3-030-40560-1_3 ◽

2020 ◽

pp. 45-97

Author(s):

Michael Huff

Keyword(s):

Integrated Circuit ◽

Manufacturing Methods ◽

Processing Steps ◽

Integrated Circuit Processing

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Device Parameter Variations in Microsystems Manufacturing

Process Variations in Microsystems Manufacturing - Microsystems and Nanosystems ◽

10.1007/978-3-030-40560-1_8 ◽

2020 ◽

pp. 313-387

Author(s):

Michael Huff

Keyword(s):

Device Parameter ◽

Parameter Variations

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Introduction

Process Variations in Microsystems Manufacturing - Microsystems and Nanosystems ◽

10.1007/978-3-030-40560-1_1 ◽

2020 ◽

pp. 1-8

Author(s):

Michael Huff

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Process Variations in Microsystems Manufacturing - Microsystems and NanosystemsLatest Publications

TOTAL DOCUMENTS

H-INDEX

Published By Springer International Publishing

Microsystems Process Integration, Testing, and Packaging

Metrology for Microsystems Manufacturing

An Overview of MEMS Microsystems

Managing Parameter Variations in Microsystems Device Design

Yield Analysis and Quality Assurance and Control Methods Used in Microsystems Manufacturing

Microsystems Material Properties

Microsystems Manufacturing Methods: MEMS Processes

Microsystems Manufacturing Methods: Integrated Circuit Processing Steps

Device Parameter Variations in Microsystems Manufacturing

Introduction

Process Variations in Microsystems Manufacturing - Microsystems and Nanosystems
Latest Publications