Advances in Patterning Materials and Processes XXXIV
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Published By SPIE

9781510607439, 9781510607446
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Nano-defect management in directed self-assembly of block copolymers (Conference Presentation)

2017 ◽  
Author(s):  
Tsukasa Azuma ◽  
Yuriko Seino ◽  
Hironobu Sato ◽  
Yusuke Kasahara ◽  
Katsuyoshi Kodera ◽  
...  
Keyword(s):  
Block Copolymers ◽  
Self Assembly ◽  
Defect Management

Evaluating structure in thin block copolymer films with soft x-rays (Conference Presentation)

2017 ◽  
Author(s):  
Daniel Sunday ◽  
Christopher Liman ◽  
Adam F. Hannon ◽  
Jiaxing Ren ◽  
Xuanxuan Chen ◽  
...  
Keyword(s):  
Block Copolymer ◽  
X Rays ◽  
Copolymer Films

Inkjet-based adaptive planarization (Conference Presentation)

2017 ◽  
Author(s):  
Shrawan Singhal ◽  
Michelle M. Grigas ◽  
Niyaz Khusnatdinov ◽  
Srinivasan V. Sreenivasan

Use of sequential infiltration synthesis to improve the pattern transfer of PS-b-PLA DSA (Conference Presentation)

2017 ◽  
Author(s):  
Laura Evangelio Araujo ◽  
Marta Fernández-Regúlez ◽  
Xavier Chevalier ◽  
Célia Nicolet ◽  
Ian Cayrefourcq ◽  
...  
Keyword(s):  
Pattern Transfer

Directed self-assembly enabled fully self-aligned via processing (Conference Presentation)

2017 ◽  
Author(s):  
Paulina A. Rincon-Delgadillo ◽  
Gayle Murdoch ◽  
Roel Gronheid ◽  
Ryoung-Han Kim ◽  
Jürgen Bömmels
Keyword(s):  
Self Assembly

Advanced hole patterning technology using soft spacer materials (Conference Presentation)

2017 ◽  
Author(s):  
Jong Keun Park ◽  
Phillip D. Hustad ◽  
Emad Aqad ◽  
David Valeri ◽  
Mike D. Wagner ◽  
...  
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