Advanced hole patterning technology using soft spacer materials (Conference Presentation)

Advances in Patterning Materials and Processes XXXIV ◽

10.1117/12.2258667 ◽

2017 ◽

Author(s):

Jong Keun Park ◽

Phillip D. Hustad ◽

Emad Aqad ◽

David Valeri ◽

Mike D. Wagner ◽

...

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