1996 Solid-State, Actuators, and Microsystems Workshop Technical Digest
Latest Publications

TOTAL DOCUMENTS

(FIVE YEARS 0)

H-INDEX

(FIVE YEARS 0)

Published By Transducer Research Foundation, Inc.

0964002418

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Advances in Photoresist Based Processing Tools for 3-Dimensional Precision and Micro Mechanics

1996 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh1996.14 ◽

1996 ◽

Author(s):

H. Guckel ◽

P.S. Mangat ◽

H. Emmerich ◽

S. Massoud-Ansari ◽

J. Klein ◽

...

Keyword(s):

3 Dimensional ◽

Dimensional Precision

Download Full-text

Low Reynolds Number Micro-Fluidic Devices

1996 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh1996.25 ◽

1996 ◽

Author(s):

J.P. Brody ◽

P. Yager

Keyword(s):

Reynolds Number ◽

Low Reynolds Number ◽

Fluidic Devices ◽

Low Reynolds

Download Full-text

Wafer-To-Wafer Transfer of Microsturctures for Vacuum Packaging

1996 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh1996.8 ◽

1996 ◽

Author(s):

M.B. Cohn ◽

Y. Liang ◽

R.T. Howe ◽

A.P. Pisano

Keyword(s):

Vacuum Packaging

Download Full-text

Media Compatible Packaging and Environmental Testing of Barrier Coasting Encapsulated Silicon Pressure Sensors

1996 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh1996.9 ◽

1996 ◽

Author(s):

D.J. Monk ◽

T. Maudie ◽

D. Stanerson ◽

J. Wertz ◽

G. Bitko ◽

...

Keyword(s):

Pressure Sensors ◽

Environmental Testing

Download Full-text

High-Density Arrays of Valves and Interconnects for Liquid Switching

1996 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh1996.61 ◽

1996 ◽

Author(s):

L. Bousse ◽

E. Dijkstra ◽

O. Guenat

Keyword(s):

High Density

Download Full-text

Surface-Micromachined Beams Without Spring Effect of Anchor Step-Up

1996 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh1996.33 ◽

1996 ◽

Author(s):

L.V. Ngo ◽

P. Nelson ◽

C.J. Kim

Download Full-text

High-Precision Silicon Micromachined Micromirrors for Laser Beam Scanning and Positioning

1996 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh1996a.17 ◽

1996 ◽

Author(s):

M.H. Kiang ◽

O. Solgaard ◽

R.S. Muller ◽

K.Y. Lau

Keyword(s):

Laser Beam ◽

High Precision ◽

Beam Scanning ◽

Laser Beam Scanning

Download Full-text

Biochemical Analysis on a Microchip

1996 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh1996a.5 ◽

1996 ◽

Author(s):

S.C. Jacobson ◽

J.M. Ramsey

Keyword(s):

Biochemical Analysis

Download Full-text

Low-Temperature Bonding for Fabrication of Miniaturized Chemical Analysis Devices

1996 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh1996a.9 ◽

1996 ◽

Author(s):

H.Y. Wang ◽

R.S. Foote ◽

S.C. Jacobson ◽

J.M. Ramsey

Keyword(s):

Low Temperature ◽

Chemical Analysis ◽

Low Temperature Bonding

Download Full-text

Binary Gas Mixture Analysis Using a Two-Dimensional Array of Interdigitated-Gate-Electrode Field-Effect Transistors

1996 Solid-State, Actuators, and Microsystems Workshop Technical Digest ◽

10.31438/trf.hh1996a.8 ◽

1996 ◽

Author(s):

J.M. Wiseman ◽

E.S. Kolesar

Keyword(s):

Field Effect ◽

Field Effect Transistors ◽

Gas Mixture ◽

Two Dimensional ◽

Mixture Analysis ◽

Gate Electrode ◽

Dimensional Array ◽

Binary Gas Mixture

Download Full-text

1996 Solid-State, Actuators, and Microsystems Workshop Technical DigestLatest Publications

TOTAL DOCUMENTS

H-INDEX

Published By Transducer Research Foundation, Inc.

Advances in Photoresist Based Processing Tools for 3-Dimensional Precision and Micro Mechanics

Low Reynolds Number Micro-Fluidic Devices

Wafer-To-Wafer Transfer of Microsturctures for Vacuum Packaging

Media Compatible Packaging and Environmental Testing of Barrier Coasting Encapsulated Silicon Pressure Sensors

High-Density Arrays of Valves and Interconnects for Liquid Switching

Surface-Micromachined Beams Without Spring Effect of Anchor Step-Up

High-Precision Silicon Micromachined Micromirrors for Laser Beam Scanning and Positioning

Biochemical Analysis on a Microchip

Low-Temperature Bonding for Fabrication of Miniaturized Chemical Analysis Devices

Binary Gas Mixture Analysis Using a Two-Dimensional Array of Interdigitated-Gate-Electrode Field-Effect Transistors

1996 Solid-State, Actuators, and Microsystems Workshop Technical Digest
Latest Publications