Emerging Technologies for In Situ Processing
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30

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1

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Published By Springer Netherlands

9789401071307, 9789400914094

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Nd: YAG Laser Processing for Circuit Modification and Direct Writing of Silicon Conductors

Emerging Technologies for In Situ Processing ◽

10.1007/978-94-009-1409-4_28 ◽

1988 ◽

pp. 265-271

Author(s):

S. LeppÄVuori ◽

J. Lenkkeri ◽

J. Levoska

Keyword(s):

Laser Processing ◽

Direct Writing ◽

Yag Laser

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Confirmation of the Wavelength Dependence of Silicon Oxidation Induced by Visible Radiation

Emerging Technologies for In Situ Processing ◽

10.1007/978-94-009-1409-4_19 ◽

1988 ◽

pp. 171-178

Author(s):

Ian W. Boyd ◽

F. Micheli

Keyword(s):

Wavelength Dependence ◽

Visible Radiation ◽

Silicon Oxidation

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Ultra High Vacuum Processing: MBE

Emerging Technologies for In Situ Processing ◽

10.1007/978-94-009-1409-4_6 ◽

1988 ◽

pp. 55-60

Author(s):

J. P. Harbison ◽

P. F. Liao ◽

D. M. Hwang ◽

E. Kapon ◽

M. C. Tamargo ◽

...

Keyword(s):

High Vacuum ◽

Ultra High Vacuum ◽

Vacuum Processing

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High Technology Manufacturing: Critical Issues for the Future

Emerging Technologies for In Situ Processing ◽

10.1007/978-94-009-1409-4_5 ◽

1988 ◽

pp. 45-54

Author(s):

E. L. Hu

Keyword(s):

High Technology ◽

The Future ◽

Critical Issues

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Study of Excimer Laser Enhanced Etching of Copper and Silicon with (Sub) Monolayer Coverages of Chlorine

Emerging Technologies for In Situ Processing ◽

10.1007/978-94-009-1409-4_29 ◽

1988 ◽

pp. 273-278

Author(s):

T. S. Baller ◽

G. N. A. Veen ◽

J. Dieleman

Keyword(s):

Excimer Laser

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Synthesis and Characterization of Laser Driven Powders

Emerging Technologies for In Situ Processing ◽

10.1007/978-94-009-1409-4_24 ◽

1988 ◽

pp. 233-240

Author(s):

E. Borsella ◽

L. Caneve ◽

R. Fantoni

Keyword(s):

Synthesis And Characterization

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Recent Advances in Photo-Epitaxy for Infrared Detector Fabrication

Emerging Technologies for In Situ Processing ◽

10.1007/978-94-009-1409-4_23 ◽

1988 ◽

pp. 221-232

Author(s):

S. J. C. Irvine ◽

M. C. Ward ◽

J. B. Mullin

Keyword(s):

Infrared Detector ◽

Recent Advances

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Laser Direct Writing for Device Applications

Emerging Technologies for In Situ Processing ◽

10.1007/978-94-009-1409-4_21 ◽

1988 ◽

pp. 201-211

Author(s):

G. Auvert ◽

Y. Pauleau ◽

D. Tonneau

Keyword(s):

Direct Writing ◽

Laser Direct Writing ◽

Device Applications

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Laser-Induced Metal Deposition for Clear Defect Repair Work on X-Ray Masks

Emerging Technologies for In Situ Processing ◽

10.1007/978-94-009-1409-4_18 ◽

1988 ◽

pp. 163-169

Author(s):

R. Putzar ◽

H.-C. Petzold ◽

U. Weigmann

Keyword(s):

Metal Deposition ◽

Repair Work ◽

X Ray ◽

Defect Repair

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The Development and use of Novel Precursors for Photolytic Deposition of Dielectric Films

Emerging Technologies for In Situ Processing ◽

10.1007/978-94-009-1409-4_16 ◽

1988 ◽

pp. 145-152

Author(s):

C. J. Brierley ◽

F. W. Ainger ◽

C. Trondle

Keyword(s):

Dielectric Films

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