The influence of magnetic field and cathode dimensions on plasma characteristics in hollow cathode system

Experimental study on the effect of cylindrical hollow cathode, working pressure and magnetic field on spatial glow distribution and the characteristics of plasma produced by dc discharge in Argon gas, were investigated by image analyses for the plume within the plasma. It was found that the emission intensity appears as a periodic structure with many peaks appeared between the electrodes. Increasing the pressure leads to increase the number of intensity peaks finally converted to continuous form at high pressure, especially with applied of magnetic field, i.e. the plasma is more stable with the presence of magnetic field. The emission intensity study of plasma showed that the intensity has a maximum value at 1.07 mbar pressure and decrease with more pressure.

Effective Sputtering System for Deposition of Wear-Resistant and Anticorrosion Coatings

Results of a target sputtering investigation have been obtained, the target being positioned on the bottom of a cylindrical hollow cathode covered by a grid. It was shown that influence on the glow discharge of a nonuniform magnetic field with lines crossing the target center as well as the grid, the hollow cathode and the target periphery, where the field lines are arc-shaped, depends on the magnetic induction on the target edge. Due to ionization by electrons emitted by the cathode and forced by the magnetic field to approach to the target more frequently the plasma density near the target grows up and more than a half of all ions produced in the discharge quite uniformly sputter the target