slurry characterization
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Energy ◽  
2019 ◽  
Vol 186 ◽  
pp. 115920 ◽  
Author(s):  
Jin-hua Huo ◽  
Zhi-gang Peng ◽  
Kun Xu ◽  
Qian Feng ◽  
De-yang Xu

2009 ◽  
Vol 52 (1) ◽  
pp. 267-273 ◽  
Author(s):  
A. Suresh ◽  
H. L. Choi ◽  
J. H. Lee ◽  
K. Zhu ◽  
H. Q. Yao ◽  
...  

2006 ◽  
Vol 17 (3) ◽  
pp. 319-332 ◽  
Author(s):  
Takamasa Mori ◽  
Kiyohito Kiyohito ◽  
Makoto Makoto ◽  
Junichiro Junichiro ◽  
Tomohiro Tomohiro

2005 ◽  
Vol 113 (1324) ◽  
pp. 761-767 ◽  
Author(s):  
Hyo-Jung KIM ◽  
Takamasa MORI ◽  
JunIchiro TSUBAKI

2005 ◽  
Vol 2005.11 (0) ◽  
pp. 281-282
Author(s):  
Yoshitaka MORIOKA ◽  
Masaharu KINOSHITA ◽  
Shinichi HABA

2005 ◽  
Vol 867 ◽  
Author(s):  
Jian Zhang ◽  
Steven Grumbine ◽  
Phillip W. Carter ◽  
Thomas Werts

AbstractA new application of the electrochemical method, in situ chronoamperometry, has been developed and used as a tool for CMP slurry characterization. The measured current response, i, resulting from a small applied potential is fit to an exponential equation, i = io + A1exp(-t/tD). The fitting parameters serve as a measure of surface reactivity (io), surface film robustness (A1), and the kinetics of film formation (tD). A description of the method and correlations to polishing performance are discussed in this paper.


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