Realizing a 140 GHz Gap Waveguide–Based Array Antenna by Low-Cost Injection Molding and Micromachining

This paper presents a novel micromachining process to fabricate a 140 GHz planar antenna based on gap waveguide technology to be used in the next-generation backhauling links. The 140 GHz planar array antenna consists of three layers, all of which have been fabricated using polymer-based microfabrication and injection molding. The 140 GHz antenna has the potential to be used as an element in a bigger 3D array in a line-of-sight (LOS) multiple input multiple output (MIMO) configuration to boost the network capacity. In this work, we focus on the fabrication of a single antenna array element based on gap waveguide technology. Depending on the complexity of each antenna layer’s design, three different micromachining techniques, SU8 fabrication, polydimethylsiloxane (PDMS) molding, and injection molding of the polymer (OSTEMER), together with gold (Au) coating, have been utilized to fabricate a single 140 GHz planar array antenna. The input reflection coefficient was measured to be below − 11 dB over a 14% bandwidth from 132 to 152 GHz, and the antenna gain was measured to be 31 dBi at 140 GHz, both of which are in good agreement with the simulations.

Fabrication of Oblique Submicron-Scale Structures Using Synchrotron Hard X-ray Lithography

Oblique submicron-scale structures are used in various aspects of research, such as the directional characteristics of dry adhesives and wettability. Although deposition, etching, and lithography techniques are applied to fabricate oblique submicron-scale structures, these approaches have the problem of the controllability or throughput of the structures. Here, we propose a simple X-ray-lithography method, which can control the oblique angle of submicron-scale structures with areas on the centimeter scale. An X-ray mask was fabricated by gold film deposition on slanted structures. Using this mask, oblique ZEP520A photoresist structures with slopes of 20° and 10° and widths of 510 nm and 345 nm were fabricated by oblique X-ray exposure, and the possibility of polydimethylsiloxane (PDMS) molding was also confirmed. In addition, through double exposure with submicron- and micron-scale X-ray masks, dotted-line patterns were produced as an example of multiscale patterning.

Manufacturing of Submicrofluidic Channels Based on Near-field Electrospinning with PEO

Background: Microfluidic channels have been widely applied in biomedicine and microelectronics. However, the manufacturing methods of microfluidic channel devices, such as photolithography, three-dimensional printing and Melt-electrospinning direct writing (MEDW), have the problem of high cost and complex process, which still can't reach a sub-micron scale stably. Method: To improve the resolution of microfluidic channels, we developed a simple and flexible method to fabricate polydimethylsiloxane (PDMS) submicrofluidic channels. It depends on the following steps: (1) Direct Writing Polyethylene oxide (PEO) nanofiber by Near-field Electrospinning (NFES). (2) Packaging the nanofiber with PDMS. (3) Obtaining the PDMS submicrofluidic channel by inverted mode of PEO nanofiber. Results: According to the result of the experiment, nanofiber can be stably prepared under the following conditions, the electrode-to-collector distance of 3.0 mm, the voltage of 1.7 KV, the collector moving speed of 80mm/s and the mixed solutions of ethanol and deionized water (1:1). Finally, the PDMS submicrofluidic channel was manufactured by NFES and PDMS molding technique, and the diameter of the channel was 0.84±0.08 μm. Conclusion: The result verified the rationality of that method. In addition, the method can be easily integrated with high resolution channels for various usages, such as microelectronics, micro electro mechanical systems, and biomedical.

A Modular, Reconfigurable Microfabricated Assembly Platform for Microfluidic Transport and Multitype Cell Culture and Drug Testing

Modular microfluidics offer the opportunity to combine the precise fluid control, rapid sample processing, low sample and reagent volumes, and relatively lower cost of conventional microfluidics with the flexible reconfigurability needed to accommodate the requirements of target applications such as drug toxicity studies. However, combining the capabilities of fully adaptable modular microelectromechanical systems (MEMS) assembly with the simplicity of conventional microfluidic fabrication remains a challenge. A hybrid polydimethylsiloxane (PDMS)-molding/photolithographic process is demonstrated to rapidly fabricate LEGO®-like modular blocks. The blocks are created with different sizes that interlock via tongue-and-groove joints in the plane and stack via interference fits out of the plane. These miniature strong but reversible connections have a measured resistance to in-plane and out-of-plane forces of up to >6000× and >1000× the weight of the block itself, respectively. The LEGO®-like interference fits enable O-ring-free microfluidic connections that withstand internal fluid pressures of >120 kPa. A single layer of blocks is assembled into LEGO®-like cell culture plates, where the in vitro biocompatibility and drug toxicity to lung epithelial adenocarcinoma cells and hepatocellular carcinoma cells cultured in the modular microwells are measured. A double-layer block structure is then assembled so that a microchannel formed at the interface between layers connects two microwells. Breast tumor cells and hepatocytes cultured in the coupled wells demonstrate interwell migration as well as the simultaneous effects of a single drug on the two cell types.

CurvChip - chip platform for investigating cell responses to curved surface features

Surface topographies are often discussed as an important parameter influencing basic cell behavior. Whereas most in-vitro studies deal with microstructures with sharp edges, smooth, curved microscale topographies might be more relevant concerning in-vivo situations. Addressing the lack of highly defined surfaces with varying curvature, we present a topography chip system with 3D curved features of varying spacing, curvature radii as well as varying overall dimensions of curved surfaces. The CurvChip is produced by low-cost photolithography with thermal reflow, subsequent (repetitive) PDMS molding and hot embossing. The platform facilitates the systematic invitro investigation of the impact of substrate curvature on cell types like epithelial, endothelial, smooth muscle cells, or stem cells. Such investigations will not only help to further understand the mechanism of curvature sensation but may also contribute to optimize cellmaterial interactions in the field of regenerative medicine.

Leak-tight vertical membrane microvalves

A novel, dual-sided PDMS molding technique enables the first leak-tight vertical membrane microvalves and allows high integration density of microfluidic components.

Microlens Array Fabrication by 3D Diffuser Lithography for Light Enhancement of Organic Light-Emitting Devices

Microlens arrays have been fabricated by 3D diffuser lithography in this study. The method mainly adopts two kinds of diffuser films with different transmittances and hazes, integrated by photolithography, polydimethylsiloxane (PDMS) molding and UV forming techniques, to get microlens arrays with different parameters and geometries. The features, such as height, geometry and fill factor of microlens arrays, are controlled by photolithography, using a photomask with circular holes and different exposure doses. The microlens arrays can also be duplicated and transferred to the surface of flexible polyethylene terephthalate (PET) substrate through PDMS molding and UV forming processes. Finally, the outcoupling efficiency of microlens arrays attached to organic light-emitting devices (OLEDs) can be measured and analyzed. More than 60% enhancement of luminous current efficiency can be obtained in experimental results.