hydrogen fluoride vapor
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Hydrogen fluoride vapor etching for Pre-Epi silicon surface preparation

1992 ◽  
Vol 21 (1) ◽  
pp. 57-60 ◽  
Author(s):  
Robert McIntosh ◽  
Tung-Sheng Kuan ◽  
Edouard Defresart
Keyword(s):  
Hydrogen Fluoride ◽  
Silicon Surface ◽  
Surface Preparation ◽  
Hydrogen Fluoride Vapor

Adsorption and reaction processes of the solvolysis of wood and pure cellulose by anhydrous hydrogen fluoride vapor

1988 ◽  
Vol 2 (4) ◽  
pp. 556-566 ◽  
Author(s):  
Gregory L. Rorrer ◽  
William R. Mohring ◽  
Martin C. Hawley ◽  
Derek T. A. Lamport
Keyword(s):  
Hydrogen Fluoride ◽  
Pure Cellulose ◽  
Anhydrous Hydrogen Fluoride ◽  
Reaction Processes ◽  
Hydrogen Fluoride Vapor
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