low temperature si epitaxy
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Investigation of Growth Mechanism and Role of H2 in Very Low Temperature Si Epitaxy

2014 ◽  
Vol 64 (6) ◽  
pp. 967-975 ◽  
Author(s):  
A. Mosleh ◽  
S. A. Ghetmiri ◽  
B. R. Conley ◽  
H. H. Abu-Safe ◽  
M. Benamara ◽  
...  
Keyword(s):  
Low Temperature ◽  
Growth Mechanism ◽  
Low Temperature Si Epitaxy ◽  
Si Epitaxy ◽  
Very Low Temperature

Low temperature Si epitaxy in a vertical LPCVD batch reactor

2000 ◽  
Vol 73 (1-3) ◽  
pp. 203-207 ◽  
Author(s):  
G Ritter ◽  
J. Harrington ◽  
B. Tillack ◽  
Th. Morgenstern ◽  
G.R. Dietze ◽  
...  
Keyword(s):  
Low Temperature ◽  
Batch Reactor ◽  
Low Temperature Si Epitaxy ◽  
Si Epitaxy

New approach to low-temperature Si epitaxy by using hot wire cell method

2000 ◽  
Vol 209 (2-3) ◽  
pp. 335-338 ◽  
Author(s):  
Tatsuro Watahiki ◽  
Akira Yamada ◽  
Makoto Konagai
Keyword(s):  
Low Temperature ◽  
Hot Wire ◽  
New Approach ◽  
Cell Method ◽  
Low Temperature Si Epitaxy ◽  
Si Epitaxy

Mechanism of Defect Formation during Low-Temperature Si Epitaxy on Clean Si Substrate

1999 ◽  
Vol 38 (Part 1, No. 4B) ◽  
pp. 2415-2418 ◽  
Author(s):  
Ichiro Mizushima ◽  
Mitsuo Koike ◽  
Tsutomu Sato ◽  
Kiyotaka Miyano ◽  
Yoshitaka Tsunashima
Keyword(s):  
Low Temperature ◽  
Defect Formation ◽  
Si Substrate ◽  
Low Temperature Si Epitaxy ◽  
Mechanism Of Defect Formation ◽  
Si Epitaxy

Role of energetic flux in low temperature Si epitaxy on dihydride-terminated Si (001)

1998 ◽  
Vol 324 (1-2) ◽  
pp. 85-88 ◽  
Author(s):  
M.E Taylor ◽  
Harry A Atwater ◽  
M.V.Ramana Murty
Keyword(s):  
Low Temperature ◽  
Low Temperature Si Epitaxy ◽  
Si Epitaxy

Low-temperature Si epitaxy with high deposition rate using ion-assisted deposition

1998 ◽  
Vol 72 (23) ◽  
pp. 2996-2998 ◽  
Author(s):  
R. B. Bergmann ◽  
C. Zaczek ◽  
N. Jensen ◽  
S. Oelting ◽  
J. H. Werner
Keyword(s):  
Low Temperature ◽  
Deposition Rate ◽  
High Deposition Rate ◽  
Low Temperature Si Epitaxy ◽  
Si Epitaxy
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